Inductively-Coupled-Plasma-Assisted Planar Magnetron Discharge for Enhanced Ionization of Sputtered Atoms
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-01
著者
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SETSUHARA Yuichi
Joining and Welding Research Institute, Osaka University
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MIYAKE Shoji
Joining and Welding Research Institute, Osaka University
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Miyake Shoji
Joining & Welding Resarch Institute Osaka University
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Kumagai M
Kanagawa Industrial Technology Research Institute
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Musil Jindrich
Department Of Physics University Of West Bohemia
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Kamai Masayoshi
Joining And Welding Research Institute Osaka University
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MUSIL Jindrich
Institute of Physics, Academy of Sciences of the Czech Republic
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Setsuhara Yuichi
Joining And Welding Research Institute Osaka University
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