Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-10-30
著者
-
節原 裕一
国立大学法人大阪大学接合科学研究所
-
Ono Koichi
Department of Molecular and Internal Medicine, Graduate School of Biomedical Sciences, Hiroshima Uni
-
Takahashi Kazuo
Department of Electronic Science and Engineering, Kyoto University
-
SETSUHARA Yuichi
Joining and Welding Research Institute, Osaka University
-
EBE Akinori
EMD Corp.
-
TAKENAKA Kosuke
Joining and Welding Research Institute, Osaka University
-
NISHISAKA Kazuaki
EMD Corporation
-
SUGIURA Shinya
Department of Engineering, Kyoto University
関連論文
- 低インダクタンス内部アンテナを用いた大口径誘導結合RFプラズマ生成
- プラズマ・プロセス技術
- Plasma Levels of Oxidized Low Density Lipoprotein Are Associated With Stable Angina Pectoris and Modalities of Acute Coronary Syndrome
- イオンビーム支援蒸着法を用いたCeO_2薄膜合成におけるモルフォロジーに及ぼすイオン照射効果
- Two-Dimensional Melting in a Coulomb Crystal of Dusty Plasmas
- PE-436 Catalytically Inactive Lipoprotein Lipase Overexpression Increases Insulin Sensitivity in Mice(Diabetes/Obesity/Metabolic syndrome-4 (H) PE73,Poster Session (English),The 70th Anniversary Annual Scientific Meeting of the Japanese Circulation Societ
- PE-044 Novel Regulation Pathway of the LDL Receptor Family for Migration of Vascular Smooth Muscle Cells(Atherosclerosis, basic-3 (H) PE8,Poster Session (English),The 70th Anniversary Annual Scientific Meeting of the Japanese Circulation Society)
- OJ-198 LR11, an LDL Receptor Family Member, Inhibits Adipocyte Maturation through the Induced Stabilization of Beta-catenin(Diabetes/Obesity/Metabolic syndrome-2 (H) OJ33,Oral Presentation (Japanese),The 70th Anniversary Annual Scientific Meeting of the J
- Resistin Causes Impaired Glucose Tolerance Accompanied with Decreased Insulin Sensitivities in Tissues of Mice Implanted with Resistin-overexpressing Cells (Diabetes/Obesity 6 (H), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- Enhanced Migration of Intimal Smooth Muscle Cells is Accompanied with Increased Expression of PDGF β-receptor in Explants from Rabbit Plaques (Atherosclerosis, Basic 7 (IHD), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- Subcutaneous Fat Alters Insulin Sensitivity by Regulation TNF-α Expression in Visceral Fat(Diabetes/Obesity 2 (H), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- Advanced Glycation End Products in Obesity and Insulin Resistance(Diabetes/Obesity 9 (H), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- LR11, an LDL Receptor Gene Family Member, is a Novel Regulator of Smooth Muscle Cell Migration(Atherosclerosis, Basic 10 (IHD), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- Clinical Features of Familial Hypercholesterolemia in Japan in a Database from 1996-1998 by the Research Committee of the Ministry of Health, Labour and Welfare of Japan
- Mutations in Japanese Subjects with Primary Hyperlipidemia : Results from the Research Committee of the Ministry of Health and Welfare of Japan since 1996
- PE-315 Vascular Effects of TAK-559, a New Potent Dual Activator of PPAR α and γ, In Hypercholesterolemic Rabbits(Atherosclerosis, Basic 4 (IHD) : PE54)(Poster Session (English))
- OJ-194 Effect of Pitavastatin on Recruitment of Bone Marrow-Derived Smooth Muscle Cells in Atheroma of ApoE-deficient Mice(Atherosclerosis, Basic 2 (IHD) : OJ22)(Oral Presentation (Japanese))
- FRS-125 Increased levels of circulating vascular endothelial growth factor is associated with visceral fat accumulation(Metabolic Syndrome (H) : FRS15)(Featured Research Session (English))
- フェムト秒レーザーを用いた半導体微細加工
- ヘリコン波励起プラズマスパッタリングによるCN_x薄膜合成
- 誘導結合型フルオロカｰボンプラズマを用いた高誘電率HfO_2薄膜のエッチング
- プラズマCVDと溶媒処理を用いたフルオロカーボン系多孔質構造Low-K薄膜の作成
- Silent Brain Infarction and Subcortical White Matter Lesions Increase the Risk of Stroke and Mortality : A Prospective Cohort Study
- Effect of One-Shot Intravenous 0.42 Mega Unit Urokinase Therapy in Patients With Acute Ischemic Stroke
- Deterioration of Vascular Dementia Caused by Recurrent Multiple Small Emboli from Thoracic Aortic Atheroma
- Combinatorial Plasma Etching Process
- 低インダクタンス内部アンテナを用いたプラズマ源の開発と反応性プラズマプロセスへの展開 (小特集 実用化プロセスにおけるプラズマ源の革新--平行平板プラズマ源から新プラズマ源へ)
- 327 イオンビーム支援蒸着法によるc-BN薄膜の合成
- 326 c-BN薄膜合成におけるイオンビームを用いた界面制御
- Effects of Ion-Beam-Irradiation on Morphology and Densification of CeO_2 Films Prepared by Ion-Beam-Assisted Deposition
- Mechanical Property of Dissimilar Material Nanocomposites Prepared by Ion Beam Assisted Sputtering Process(Physics, Processes, Instruments & Measurements)
- Oxidized LDL Modulates Apoptosis of Human Atherosclerotic Plaque Smooth Muscle Cells via Regulation of the Insulin-Like Growth Factor-1 System(Atherosclerosis, Basic 6 (IHD), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- Morphology and Microstructure of Hard and Superhard Zr-Cu-N Nanocomposite Coatings
- Enhanced expression of the LDL receptor family member LR11 increases migration of smooth muscle cells in vitro
- Clinical significance of serum cytokeratin-19 fragment (CYFRA 21-1) in hepatocellular carcinoma
- 研究開発の効率を飛躍的に高めるコンビナトリアルプラズマ解析装置 (特集 プラズマ技術の新しい挑戦)
- 4. マルチ低インダクタンス内部アンテナを用いた次世代メートル級大面積プロセスに向けたプラズマ生成制御技術(プラズマと電磁波の相互作用の新規応用 : 空間的・時間的デザインが拓く新機能)
- 21406 マルチアンテナ型RFプラズマによるメートル級大面積での低ダメージプロセスと制御(基調講演,デバイス&配線技術2,OS.1 機械工学が支援する微細加工技術(半導体・MEMS・NEMS),学術講演)
- Characterization of ion energy distribution in inductively coupled argon plasmas sustained with multiple internal-antenna units (Special issue: Dry process)
- Large-Area and High-Speed Deposition of Microcrystalline Silicon Film by Inductive Coupled Plasma using Internal Low-Inductance Antenna
- Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units
- Effects of Antenna Size and Configurations in Large-Area RF Plasma Production with Internal Low-Inductance Antenna Units
- メートルサイズの大面積プロセスに向けたプラズマ技術
- 次世代メートルサイズ大面積プロセス用プラズマ源
- フェムト秒レーザーによる物質プロセッシング
- Zr-based Hydrogen Absorbing Films Prepared by Ion Beam Assisted Deposition(Physics, Processes, Instruments & Measurements)
- プラズマ源の開発
- ミリ波によるセラミックス加熱・焼結 (特集 セラミックス電磁プロセシングの動向)
- Tribological Property of CeO_2 Films Prepared by Ion-Beam-Assisted Deposition
- Adenosine Triphosphate-sensitive Micro-reentrant Atrial Tachycardia Originating from the Crista Terminalis in a Patient with Chronic Renal Failure due to Thrombotic Thrombocytopenic Purpura
- Effects of tributyltin on the emotional behavior of C57BL/6 mice and the development of atopic dermatitis-like lesions in DS-Nh mice
- Cyclophosphamide decreases the number, percentage and the function of CD25^+ CD4^+ regulatory T cells, which suppress induction of contact hypersensitivity
- Two Cases of Contact Dermatitis due to 1, 3-Butylene Glycol
- 酸化物薄膜創成におけるミラー型ECRプラズマに及ぼすRFバイアス効果
- 6.低インダクタンス内部アンテナを用いたプラズマ源の開発と反応性プラズマプロセスへの展開(実用化プロセスにおけるプラズマ源の革新〜平行平板プラズマ源から新プラズマ源へ〜)
- Properties of (Ti, Al) N films prepared by ion beam assisted deposition(Physics, Process, Instrument & Measurements)
- Efficacy of linear block at the left atrial roof in atrial fibrillation
- Herpesvirus DNA in Peripheral Blood Mononuclear Cells of Some Patients with Meniere's Disease
- Genetic control of delayed-type hypersensitivity to gold antigens in mice
- Catheter Ablation of a Complex Atrial Tachycardia after Surgical Repair of Tetralogy of Fallot Guided by Combined Noncontact and Contact Mapping
- Angiotensin-Converting Enzyme Inhibitor Improves Diastolic Dysfunction And Symptoms in Ischemic Diastolic Heart Failure(Cardiac Function, Basic/Clinical 4 (M), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- Plasma Diagnostics and Thrust Performance Analysis of a Microwave-Excited Microplasma Thruster
- A Model Analysis of Feature Profile Evolution and Microscopic Uniformity during Polysilicon Gate Etching in Cl_2/O_2 Plasmas
- Formation of Carbon Nitride Films by Helicon Wave Plasma Enhanced DC Sputtering
- C-514T polymorphism in the hepatic lipase gene determines plasma lipid levels in the subjects with familial combined hyperlipidemia
- Influence of Japanese cedar pollen on atopic dermatitis
- Helicon Wave Plasma Enhanced Sputtering and Application to Synthesis of Carbon Nitride Films(Physics, Process, Instrument & Measurements)
- Studies on Magnetron Sputtering Assisted by Inductively Coupled RF Plasma for Enhanced Metal Ionization
- Inductively-Coupled-Plasma-Assisted Planar Magnetron Discharge for Enhanced Ionization of Sputtered Atoms
- Use of Focused High-Power 60-GHz Radiation Beams for Advanced Sintering of Ceramics(Physics, Processes, Instruments & Measurements)
- Influence of Ion Irradiation on Crystalline Phases of Oxide Films(Materials, Metallurgy & Weldability)
- Ti-Al Alloy Films Synthesized by Ion-Beam-Enhanced Deposition(Physics, Process, Instrument & Measurements)
- Structure Changes of Coulomb Crystal in a Carbon Fine-Particle Plasma
- Simple Hexagonal Coulomb Crystal near a Deformed Plasma Sheath Boundary in a Dusty Plasma
- Dilute TCE Decomposition by the Nonthermal Plasma Combined with MnO_2-supported Alumina
- Dilute TCE decomposition by the nonthermal plasma combined with MnO_2-supported alumina
- Anesthetic management of a patient with β-thalassemia intermedia undergoing splenectomy : a case report
- Effects of lumbar sympathetic ganglion block for a patient with amyotrophic lateral sclerosis (ALS)
- Combined neurolytic block of celiac, inferior mesenteric, and superior hypogastric plexuses for incapacitating abdominal and/or pelvic cancer pain
- 泥しょう鋳込み法により作製したZrO_2-3mol%Y_2O_3成形体のマイクロ波焼結
- 336 誘導結合型プラズマスパッタリングの研究
- Production of Inductively-Coupled Large-Diameter Plasmas with Internal Antenna
- 342 マイクロ波を利用したセラミックス焼結の研究
- フレキシブルデバイス創製に向けたプラズマ-ソフトマテリアル相互作用の解析
- 表面機能化プロセス
- プラズマ異方性化学気相堆積法による硬質カーボン薄膜の低温製膜 (特集 革新的プラズマ科学の新潮流)
- フレキシブルデバイス創製に向けたプラズマーソフトマテリアル相互作用の解析
- スマートプロセス学会 表界面プロセス部会
- Characterization of Ion Energy Distribution in Inductively Coupled Argon Plasmas Sustained with Multiple Internal-Antenna Units
- Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units
- イオン・プラズマプロセスによる硼素,炭素,窒素系超硬質薄膜の合成
- イオン照射を利用した成膜プロセスの評価法
- 234 ヘリコンプラズマスパッタリングによるCN_x薄膜合成
- Plasma-Enhanced Reactive Magnetron Sputtering Assisted with Inductively Coupled Plasma for Reactivity-Controlled Deposition of Microcrystalline Silicon Thin Films