Influence of Ion Irradiation on Crystalline Phases of Oxide Films(Materials, Metallurgy & Weldability)
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概要
- 論文の詳細を見る
The films of four oxides of silicon, aluminum, titanium and zirconium synthesized by ion beam assisted deposition (IBAD) method and also their crystalline states were examined by XRD and XPS methods. Further, the influence of ion irradiation on the crystalline-amorphous transition was examined by ion process parameters. The change of the deposited oxide films from crystalline state to amorphous one was characterized by the coordination number of cation to oxygen in these oxides and the ionicity of cation-oxygen bond.
- 大阪大学の論文
著者
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節原 裕一
国立大学法人大阪大学接合科学研究所
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MIYAKE Shoji
Osaka University
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MAKINO Yukio
Osaka University
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SETSUHARA Yuichi
Osaka University
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Makino Y
Osaka Univ. Osaka Jpn
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SHIBATA Kazuo
Osaka University
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