Ion and Neutral Particle Diagnostics in Reactive ECR Plasma(Physics, Process, Instruments & Measurements)

概要

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High resolution optical measurements of Doppler profiles of Ar neutral lines have been performed to determination the average translational energies of Ar neutral in an electron cyclotron resonance (ECR) process plasma. Preliminary experiments Ar and Ar/H_2 mixture gases have been used in the operating pressure range of 10^<-2> to 3×10^<-1> Pa with microwave power (2.45GHz) of 165-495W. The optical emission line profiles from source plasma have been measured in parallel and perpendicular directions to the axis of magnetic coils, yielding the Ar energies of 0.9eV in parallel geometry and 0.2eV in perpendicular geometry. Also presented in this paper are measurements of the ion species distribution in Ar, H_2, N_2 and CH_4/Ar mixture plasmas using a time-of-flight (TOF) analyzer. The TOF analysis in an H_2 plasma has shown that the main ion species are molecular ions of <H_3>^+ or <H_2>^+ in the typical operating pressure of 10^<-3>-10^<-1>Pa.
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