Diamond Synthesis by High Power Microwave Plasma(Physics, Process, Instrument & Measurement)
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概要
- 論文の詳細を見る
Using a high power microwave of f=915MHz, diamond synthesis by the plasma CVD in evacuated and atmospheric pressure environments is studied. The rapid growth of diamond particles at atmospheric pressure is observed with a speed of 20-50μm/h depending on the substrate temperature. The plasma density at 100kPa is found to be 10^<14>-10^<15>cm^<-3>, which is lower in two orders of magnitude than the ones by RF-and/or arc-plasma at the same pressure.
- 大阪大学の論文
著者
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MIYAKE Shoji
Osaka University
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ARATA Yoshiaki
Kinki University
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CHEN Wei
Osaka University
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Hoshino Akira
Ulvac
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