Synthesis of Titanium Oxide by Dynamic Ion Beam Mixing(Materials, Metallurgy & Weldability)
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概要
- 論文の詳細を見る
Titanium-oxide thin films were synthesized using dynamic ion beam mixing method. High energy <O_2>^+ and/or O^+ beams (30-40keV) were injected during the vapour deposition of Ti on Si single crystals and quartz plates. Structure of deposited films revealed that of TiO in spite of the change of various external parameters. The growth of TiO crystal had a tendency to vary from (111) to (200) orientation with increase of oxygen ion dose. By the heat treatment of synthesized films at 600C in the open air the structure changed to include TiO_2.
- 大阪大学の論文
著者
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MIYAKE Shoji
Osaka University
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SATOU Mamoru
Government Industrial Research Institute
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FUJIMOTO Fuminori
Institute of Scientific and Industrial Research, Osaka University
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Kobayashi Takuya
Osaka University
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Satou Mamoru
Goverment Industrial Research Institute
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Fujimoto Fuminori
Institute Of Physics College Of General Education University Of Tokyo
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