Dynamic Mixing Experiment for Oxide Film Formation with ECR Ion Beam(Physics, Process, Instrument & Measurement)
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概要
- 論文の詳細を見る
A compact dynamic mixing system equipped with a bucket type ECR ion source was developed for the formation of oxide films. The machine characteristics was tested and modified to be appropriate for the mixing experiment. The ion energy can be varied between 5 to 25keV with sufficient current density for the oxide fillm synthesis. Formation of titanium oxide films were performed by the combination of electron beam evaporation of Ti metals and oxygen ion beam injection onto Si wafers and/or quarts plates. Only rutile type TiO_2 films were obtained by varying the beam energy and the arrive rate of Ti/O.
- 大阪大学の論文
著者
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MIYAKE Shoji
Osaka University
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SATOU Mamoru
Government Industrial Research Institute
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Satou Mamoru
Government Industrial Research Insitute
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Satou Mamoru
Goverment Industrial Research Institute
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Honda Kazuhiko
Nippon Steel Corporation
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KYOU Bunkei
Kinki University
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