Etching Rate Control by MeV O^+ Implantation for Laser-Chemical Reaction of Ferrite : Beam-Induced Physics and Chemistry

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-01-31

著者

• Satoh Minoru

  Nagaoka University Of Technology

• Namba S

  Inst. Physical And Chemical Research Wako

• Satoh M

  Tohoku Univ. Sendai Jpn

• Namba Susumu

  Faculty Of Engineering Science Osaka University

• Namba Susumu

  Faculty Of Engineering Science And Research Center For Extreme Materials Osaka University

• Namba Susumu

  Nagasaki Institute Of Applied Science

• TAKAI Mikio

  Faculty of Engineering Science, and Research Center for Extreme Materials, Osaka University

• CHAYAHARA Akiyoshi

  Government Industrial Research Institute

• SATOU Mamoru

  Government Industrial Research Institute

• Yong Feng

  Facully of Engineering Science and Research Center for Extreme Materials, Osaka university

• SANDA Hiroyuki

  Central Research Laboratory, Glory Ltd.

• NAGATOMO Syohei

  D.S. Scanner Co., Ltd

• SANDA Hiroyuki

  Faculty of Engineering Science and Tesearch Center for Extreme Materials, Osaka University

• Yong Feng

  Facully Of Engineering Science And Research Center For Extreme Materials Osaka University

• Namba Susumu

  Frontier Research Program Riken

• Chayahara Akiyoshi

  Department Of Electrical Engineering Hiroshima University

• Satou Mamoru

  Goverment Industrial Research Institute

• Sanda Hiroyuki

  Faculty Of Engineering Science And Tesearch Center For Extreme Materials Osaka University

• Nagatomo S

  Shizuoka Univ. Shizuoka Jpn

• Takai Mikio

  Faculty Of Engineering Science And Research Center For Extreme Materials (rcem) Osaka University

• Namba Susumu

  Faculty Of Engineering Science And Research Center For Extreme Materials (rcem) Osaka University

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