Improvement in Characteristics of Polycrystalline Silicon Thin-Film Transistors by Heating with High-Pressure H_2O Vapor

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1998-09-15

著者

• Satoh Minoru

  Nagaoka University Of Technology

• Sameshima T

  Tokyo Univ. Agriculture And Technol. Tokyo Jpn

• Sameshima Toshiyuki

  Tokyo University Of Agriculture And Technology

• Sameshima Toshiyuki

  Sony Research Center

• Satoh M

  Tohoku Univ. Sendai Jpn

• Sakamoto Keiji

  Tokyo University Of Agriculture And Technology

• Satoh Masaharu

  Department Of Electrical Engineering Faculty Of Engineering Osaka University

• Satoh M

  Department Of Physics Faculty Of Science Okayama University

• SAITOH Keiko

  Tokyo University of Agriculture and Technology

• Sakamoto K

  Tohoku Univ. Miyagi Jpn

• Saitoh Keiko

  Tokyo University Of Agriculture & Technology

• Sakamoto Kunihiro

  Electrotechnical Laboratory (etl)

• Sameshima Toshiyuki

  Tokyo A&t University

• Ozaki K

  Tokyo Univ. Agriculture And Technol. Tokyo Jpn

• SATOH Mitsuru

  Tokyo University of Agriculture and Technology

• OZAKI Kentaro

  Tokyo University of Agriculture and Technology

• Satoh Mitsuru

  Tokyo University Of Agriculture & Technology

• Sakamoto Kenji

  Institute Of Fluid Science Tohoku University

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