Pulsed Laser-Induced Amorphization of Polycrystalline Silicon Film
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-04-20
著者
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Sameshima T
Tokyo Univ. Agriculture And Technol. Tokyo Jpn
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Sameshima Toshiyuki
Sony Research Center
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Sameshima Toshiyuki
Sony Corporation Research Center
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HARA Masaki
Sony Research Center
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USUI Setsuo
Sony Research Center
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Usui Setsuo
Sony Corporation Research Center
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Usui Setsuo
Research Center Sony Corporation
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Hara M
Frontier Research Program The Institute Of Physical And Chemical Research (riken)
関連論文
- Improvement of Gate-Insulator/Silicon Interface Characteristics in Amorphous Silicon Thin Film Transistors
- Observation of Laser-Induced Melting of Silicon Film Followed by Amorphization
- Pulsed Laser-Induced Amorphization of Polycrystalline Silicon Film
- Measuring the Temperature of a Quartz Substrate during and after the Pulsed Laser-Induced Crystallization of a-Si:H
- In Vitro Monitoring of Live Cardiomyocytes Dynamics by a Scanning Near Field Optical Microscope Setup
- In Situ Observation of Pulsed Laser Doping : Semiconductors and Semiconductor Devices
- Fabrication of Heavily-Doped Polycrystalline Silicon Film Using a Laser-Doping Technique
- Crystalline Properties of Laser Crystallized Silicon Films
- The Gas Combustion of H_2 with N_2O Used for Rapid Thermal Annealing
- Application of Rapid Joule Heating Method to Fabrication of Polycrystalline Silicon Thin Film Transistors
- Rapid Joule Heating of Metal Films Used to Fabricate Polycrystalline Silicon Thin Film Transistors : Semiconductors
- Correlation Between Bulk Orderings and Anchoring Structures of Liquid Crystals Studied by Scanning Tunneling Microscopy
- Phases and Third-Order Optical Nonlinearities in Tetravalent Metallophthalocyanine Thin Films
- Enhancement of Third-Order Optical Nonlinearities of Soluble Vanadyl Phthalocyanines in Doped Polymer Films
- Third-Order Optical Nonlinearities in Porphyrins with Extended π-Electron Systems
- Development of a Hybrid Scanning Near-field Optical/Tunneling Microscopor (SNOM/STM) System
- Self-Assembly and Functional Group Effect of Asymmetric Disulfides on Graphite Studied by Scanning Tunneling Microscopy
- Solvent Effect on Domain Formation of 4-Mercaptopyridine Self-Assembled Monolayers on Au(111) Substrate by Scanning Tunneling Microscopy
- Exchange Kinetics of Alkanethiol Self-Assembled Monolayers Probed by Attenuated Total Reflection with Enhancement of Surface Plasmon Resonance
- Imaging of Proteins Adsorbed on Self-Assembled Monolayers by Atomic Force Microscopy in Liquid
- Formation and Exchange Processes of Alkanethiol Self-Assembled Monolayer on Au(111) Studied by Thermal Desorption Spectroscopy and Scanning Tunneling Microscopy
- Alkyl Chain Length Effect on Growth Kinetics of n-Alkanethiol Self-Assembled Monolayers on Gold Studied by X-Ray Photoelectron Spectroscopy
- Thermal Desorption Spectroscopy of Alkanethiol Self-Assembled Monolayer on Au(111)
- Dimerization Process in Alkanethiol Self-Assembled Monolayer on Au(111)
- Study on Surface Acoustic Wave Devices for a Pulse Position Modulated Direct Sequence Spread Spectrum Communication System
- Surface Acoustic Wave Multiple Phase Shift Keying Modulator-Demodulator Circuits
- Anchoring Structure of Binary Mixture of Liquid Crystals Studied by Scanning Tunneling Microscopy
- Rotational Temperature, Inversion Density and Absolute Population Density for the CO_2 (00^02) Sequence Band Laser
- Novel Quadruple Zigzag Structure of Antiferroelectric Liquid Crystal Molecules Observed by Scanning Tunneling Microscopy
- Formation Kinetics and Structure of 3-Octylthiophene Self-Assembled Monolayers on Gold Surfaces
- Improvement in Characteristics of Polycrystalline Silicon Thin-Film Transistors by Heating with High-Pressure H_2O Vapor
- Heat Theatment of Amorphous and Polycrystalline Silicon Thin Films with High-Pressure H_2O Vapor
- Heat Treatment of Amorphous and Polycrystalline Silicon Thin Films with H_20 Vapor
- Heat Treatment with High-Pressure H_2O Vapor of Pulsed Laser Crystallized Silicon Films
- Electrical Properties of Excimer-Laser-Crystallized Lightly Doped Polycrystalline Silicon Films
- Injection Luminescence in ZnTe Diodes
- Anisotropy of Binary Mass Diffusion Constants in Nematic, Smectic A and Smectic B Phases Studied by Forced Rayleigh Scattering
- Binary Mass Diffusion Constants in Nematic Liquid Crystals Studied by Forced Rayleigh Scattering
- Experimental Observation of the Total Reflection by a Monodomain Cholesteric Liquid Crystal
- Forced Rayleigh Scattering in nCB'S (n=5-9) with Methyl Red and Binary Mass Diffusion Constants
- Control of the Size and Position of Silicon Nanowires Grown via the Vapor-Liquid-Solid Technique
- High Performance Bottom Gate TFTs by Excimer Laser Crystallization and Post Hydrogernation
- Experimental Studies on Reflection Spectra in Monodomain Cholesteric Liquid Crystal Cells : Total Reflection, Subsidiary Oscillation and Its Beat or Swell Structure
- A Tunable 90° Rotator Using a Total Reflection by a Monodomain Cholesteric Liquid Crystal Cell
- Near Infrared Absorption in P-Doped ZnTe Crystals
- Near Infrared Absorption in Phosphorus Doped P-Type ZnTe
- Anomalous Variations in Conductivity of a-Si: H with Nitrogen Doping
- Behavior of Fluorine Atoms in a-Si: F: H Alloy Investigated by Gas Evolution and Infrared Absorption
- Photoluminescence Spectra of ZnTe with Anomalous Temperature Dependence
- Analysis of Dopant Diffusion in Molten Silicon Induced by a Pulsed Excimer Laser
- XeCl Excimer Laser Annealing Used to Fabricate Poly-Si TFT's