Control of the Size and Position of Silicon Nanowires Grown via the Vapor-Liquid-Solid Technique
スポンサーリンク
概要
- 論文の詳細を見る
The diameter and position of vapor-liquid-solid (VLS) grown Si nanowires can be controlled by exploiting the difference in Au condensation coefficient on Si and SiO_2 surfaces at elevated temperature. For low Au fluxes in the temperature range 520-700℃, Au condensation is completely selective to Si. Holes are etched through the surface oxide layer of a thermally oxidized Si(111) wafer to expose the Si. When Au is then evaporated onto the surface, the Au atoms condense selectively in the holes and form liquid Au/Si alloy balls. If the holes contain a small Si island protrusion formed by etching this acts as an alloy nucleation center and the alloy can agglomerate to form a single ball, the diameter of which is determined by the diameter of the hole and the total dose of Au. When silane gas is then introduced into the chamber as the Si source gas in the VLS reaction each alloy ball grows to form a Si wire of controlled diameter and position.
- 社団法人応用物理学会の論文
- 1997-10-15
著者
-
USUI Setsuo
Sony Research Center
-
Gosain D
Sony Corp. Yokohama Jpn
-
Usui Setsuo
Research Center Sony Corporation
-
WESTWATER Jonathan
Research Center, Sony Corporation
-
GOSAIN Dharam
Research Center, Sony Corporation
-
Westwater Jonathan
Research Center Sony Corporation
関連論文
- Observation of Laser-Induced Melting of Silicon Film Followed by Amorphization
- Pulsed Laser-Induced Amorphization of Polycrystalline Silicon Film
- Measuring the Temperature of a Quartz Substrate during and after the Pulsed Laser-Induced Crystallization of a-Si:H
- In Situ Observation of Pulsed Laser Doping : Semiconductors and Semiconductor Devices
- Fabrication of Heavily-Doped Polycrystalline Silicon Film Using a Laser-Doping Technique
- Injection Luminescence in ZnTe Diodes
- Control of the Size and Position of Silicon Nanowires Grown via the Vapor-Liquid-Solid Technique
- High Performance Bottom Gate TFTs by Excimer Laser Crystallization and Post Hydrogernation