Heat Theatment of Amorphous and Polycrystalline Silicon Thin Films with High-Pressure H_2O Vapor

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1998-08-15

著者

• Satoh Minoru

  Nagaoka University Of Technology

• Sameshima T

  Tokyo Univ. Agriculture And Technol. Tokyo Jpn

• Sameshima Toshiyuki

  Tokyo University Of Agriculture And Technology

• Sameshima Toshiyuki

  Sony Research Center

• Satoh M

  Tohoku Univ. Sendai Jpn

• Sakamoto Keiji

  Tokyo University Of Agriculture And Technology

• Satoh Masaharu

  Department Of Electrical Engineering Faculty Of Engineering Osaka University

• Satoh M

  Department Of Physics Faculty Of Science Okayama University

• SAITOH Keiko

  Tokyo University of Agriculture and Technology

• Sakamoto K

  Tohoku Univ. Miyagi Jpn

• Saitoh Keiko

  Tokyo University Of Agriculture & Technology

• Sakamoto Kunihiro

  Electrotechnical Laboratory (etl)

• Sameshima Toshiyuki

  Tokyo A&t University

• Ozaki K

  Tokyo Univ. Agriculture And Technol. Tokyo Jpn

• SATOH Mitsuru

  Tokyo University of Agriculture and Technology

• OZAKI Kentaro

  Tokyo University of Agriculture and Technology

• Satoh Mitsuru

  Tokyo University Of Agriculture & Technology

• Sakamoto Kenji

  Institute Of Fluid Science Tohoku University

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• High-Dose Implantation of MeV Carbon Ion into Silicon
• Three-Dimensional Analysis of Locally Implanted Atoms by MeV Helium Ion Microprobe
• Au^+-Ion-Implanted Silica Glass with Non-Linear Optical Property
• Etching Rate Control by MeV O^+ Implantation for Laser-Chemical Reaction of Ferrite : Beam-Induced Physics and Chemistry
• Microbeam Line of MeV Heavy Ions for Materials Modification and In-Situ Analysis : Beam-Induced Physics and Chemistry
• Local Control of Magnetic Property in Stainless Steel Surface by Ion and Laser Beams : Beam-Induced Physics and Chemistry
• Microbeam Line of MeV Heavy Ions for Materials Modification and In-Situ Analysis
• Local Control of Magnetic Property in Stainless Steel Surface by Ion and Laser Beams
• Etching Rate Control by MeV O^+ Implantation for Laser-Chemical Reaction of Ferrite
• Preferentially Oriented Crystal Growth in Dynamic Mixing Process : An Approach by Monte Carlo Simulation
• Focused High-Energy Heavy Ion Beams
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