Similarities in Spatial Distributions of Absolute GeH_2 Density, Radical Production Rate and Particle Amount in GeH_4 RF Discharges
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概要
- 論文の詳細を見る
In order to study the particle growth processes in GeH_4 RF discharges, the spatial distribution of the absolute GeH_2 density is measured for the first time together with those of particle amount and radical production rate (Ge emission intensity) in a moderately high power range of 0.5-1.0 W/cm^2. The particles are generated and grow around the plasma/sheath boundary near the powered electrode, and the spatial distribution of their amount is similar to those of radical production rate and GeH_2 density. Furthermore, GeH_2 density is about 10^<10> cm^<-3>, being close to SiH_2 density in SiH_4 discharges for the similar conditions of RF power and pressure. These results indicate that GeH_2 is a highly reactive radical having a high production rate and hence is a candidate for the main contributor to the particle growth.
- 社団法人応用物理学会の論文
- 1998-04-15
著者
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渡部 行男
九大院理
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Watanabe Yoshihide
Department Of Electronics Faculty Of Engineering Tottori University
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渡部 行男
九州工業大学工学部電気工学科
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Shiratani M
Department Of Electronics Graduate School Of Information Science And Electrical Engineering Kyushu U
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Shiratani Masaharu
Department Of Electoronics Kyushu University
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Sakamoto K
Tohoku Univ. Miyagi Jpn
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Sakamoto Kunihiro
Electrotechnical Laboratory (etl)
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Sakamoto Kenji
Institute Of Fluid Science Tohoku University
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Kawasaki Hiroharu
Department Of Electrical Engineering Sasebo National College Of Technology
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Fukuzawa Tsuyoshi
Department Of Electronic Device Engineering Graduate School Of Information Science And Electrical En
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Watanabe Yukio
Department Of Electrical Engineering Faculty Of Engineering Kyushu University
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SAKAMOTO Kazutaka
Department of Electronic Device Engineering, Graduate School of Information Science and Electrical E
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KIDA Junichirou
Department of Electronic Device Engineering, Graduate School of Information Science and Electrical E
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Kida Junichirou
Department Of Electronic Device Engineering Graduate School Of Information Science And Electrical En
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Shiratani Masaharu
Department of Electoronics, Kyushu University
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Fukuzawa Tsuyoshi
Department of Electronic Device Engineering, Graduate School of Information Science and Electrical Engineering, Kyushu University
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Kawasaki Hiroharu
Department of Electrical and Electronic Engineering, Sasebo National College of Technology, Sasebo, Nagasaki 857-1193, Japan
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