New Method to Increase Solid Precursor Vaporization for Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-02-15
著者
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Satoh Minoru
Nagaoka University Of Technology
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Satoh M
Tohoku Univ. Sendai Jpn
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Satoh Masaharu
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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Satoh M
Department Of Physics Faculty Of Science Okayama University
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Yoshizawa S
Dowa Mining Co. Ltd. Tokyo
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Yoshizawa Shuji
Department Of Chemistry Meisei University
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TASAKI Yuzo
Superconducting Product Development Center, Dowa Mining Co., Ltd.
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SATOH Mamoru
Superconducting Product Development Center, Dowa Mining Co., Ltd.
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Tasaki Yuzo
Superconducting Product Development Center Dowa Mining Co. Ltd.
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Yoshizawa Shuji
Department Of Chemistry Department Of Physics And Frontier Research Center For The Global Environmen
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