Thermal Decompositiom of Ce0_2 in Ultra High Vacuum as a Cause of Polycrystalline Growth of Si Films on Epitaxial Ce0_2/Si

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-02-01

著者

• Satoh Minoru

  Nagaoka University Of Technology

• Yokoyama Y

  Inst. For Materials Res. Tohoku Univ.

• Satoh M

  Tohoku Univ. Sendai Jpn

• Inoue T

  Tohoku Univ. Sendai Jpn

• Inoue T

  Advanced Discrete Semiconductor Technology Laboratory Corporated Research And Development Center Tos

• Inoue Tatsuya

  Materials And Components Research Laboratory Components And Devices Research Center Matsushita Elect

• Inoue Tetsushi

  Research Laboratory Of Resources Utilization Tokyo Institute Of Technology

• Satoh Masaharu

  Department Of Electrical Engineering Faculty Of Engineering Osaka University

• Yoshida Y

  Department Of Energy Engineering And Science Nagoya University

• Yamada Y

  Akita Univ. Akita Jpn

• Yamada Yuh

  National Research Institute For Metals

• Inoue Takahito

  Electrotechnical Laboratory

• Satoh M

  Department Of Physics Faculty Of Science Okayama University

• Yamamoto Yasuhiro

  College Of Engineering Hosei University

• ARAI Satoshi

  College of Engineering, Hosei University

• MATSUDA Taketo

  College of Engineering, Hosei University

• SATOH Masataka

  Research Center of Ion Beam Technology, Hosei University

• INOUE Tomoyasu

  Department of Electronic Engineering, Iwaki Meisei University

• Matsuda Taketo

  College Of Engineering Hosei University:(present Address)integrated Circuit Advanced Process Enginee

• Satoh Masataka

  Research Center Of Ion Beam Technology And College Of Engineering Hosei University

• Inoue T

  Applied Laser Engineering Research Institute

• Arai Satoshi

  College Of Engineering Hosei University

• Yokoyama Yoshihiko

  Superconductivity Research Laboratory, International Superconductivity Technology Center

関連論文

• Enhanced Tensile Strength and Plasticity of Zr-Cu-Al Bulk Glassy Alloys at Cryogenic Temperatures
• Heterogeneous Process of Disordering and Structural Refinement in Ni_3Al during Severe Plastic Deformation by High-Pressure Torsion
• Effect of Nanocrystallization and Twinning on Hardness in Ni_3Al Deformed by High-Pressure Torsion
• Nucleation and Growth in Undercooled Melts of Bulk-Metallic-Glass Forming Zr_Ni_Al_ Alloy
• Cold-Rolled Zr_Cu_Ni_Al_ Bulk Amorphous Alloys with Tensile Plastic Elongation at Room Temperature
• High-Dose Implantation of MeV Carbon Ion into Silicon
• Three-Dimensional Analysis of Locally Implanted Atoms by MeV Helium Ion Microprobe
• Au^+-Ion-Implanted Silica Glass with Non-Linear Optical Property
• Etching Rate Control by MeV O^+ Implantation for Laser-Chemical Reaction of Ferrite : Beam-Induced Physics and Chemistry
• Microbeam Line of MeV Heavy Ions for Materials Modification and In-Situ Analysis : Beam-Induced Physics and Chemistry
• Local Control of Magnetic Property in Stainless Steel Surface by Ion and Laser Beams : Beam-Induced Physics and Chemistry
• Microbeam Line of MeV Heavy Ions for Materials Modification and In-Situ Analysis
• Local Control of Magnetic Property in Stainless Steel Surface by Ion and Laser Beams
• Etching Rate Control by MeV O^+ Implantation for Laser-Chemical Reaction of Ferrite
• Preferentially Oriented Crystal Growth in Dynamic Mixing Process : An Approach by Monte Carlo Simulation
• Focused High-Energy Heavy Ion Beams
• Surface Structure of Ion-Implanted Silica Glass
• Tomography of Microstructures by Scanning Micro-RBS Probe
• Optimization in Spot Sizes of Focused MeV Ion Beam by Precise Adjustment of Lens-Current Excitations : Nuclear Science, Plasmas and Electric Discharges
• Titanium Nitride Crystal Growth with Preferred Orientation by Dynamic Mixing Method
• Homogeneous Growth of Zinc Oxide Whiskers
• Epitaxial Growth of Zinc Oxide Whiskers by Chemical-Vapor Deposition under Atmospheric Pressure
• Reduction of Surface Resistance of ErBa_2Cu_3O_ Films by BaZrO_3 Nano-Particle Inclusion
• Correlation between Film Thickness and Critical Current Density of Sm_Ba_Cu_3O_ Films Deposited by Pulsed Laser Deposition : Superconductors
• A new method for preparing plan-view TEM specimen of multilayered films using focused ion beam
• Fabrication of Fe-Te-S Superconducting Epitaxial Thin Films by Pulsed Laser Deposition
• Effect of c-Axis-Correlated Disorders on the Vortex Diagram of the Pinning State
• Critical Current Density Enhancement around a Matching Field in ErBa_2Cu_3O_ Films with BaZrO_3 Nano-Rods
• Relaxation of Free Volume in Zr_Cu_Al_ Bulk Metallic Glasses Studied by Positron Annihilation Measurements
• Glassy Solidification Criterion of Zr_Cu_Al_ Alloy
• Drastic Increase in the Toughness of Structural Relaxed Hypoeutectic Zr_Cu_Al_ Bulk Glassy Alloy
• Relations between the thermal and mechanical properties of cast Zr-TM-Al (TM: Cu, Ni, or Co) bulk glassy alloys (Special issue on bulk metallic glasses: selected papers from the fifth international conference on bulk metallic glasses (BMGV))
• Fatigue-Strength Enhancement of Cast Zr_Cu_Al_ Glassy Alloys
• Relaxation and Crystallization Behavior of the Zr_Cu_Al_ Metallic Glass
• Evolution of Mechanical Properties of Cast Zr_Cu_Al_ Glassy Alloys by Structural Relaxation
• Characterization of Crystalline Inclusions in Cast Bulk Zr-Cu-Ni-Al Glassy Alloy
• Effect of Ni Addition on Fatigue Properties of Bulk Glassy Zr_Cu_Al_ Alloys
• Electron Beam Welding of Zr_Cu_Ni_Al_ Bulk Glassy Alloys
• Relationship Between the Liquidus Surface and Structures of Zr-Cu-Al Bulk Amorphous Alloys
• Oxygen Embrittlement and Effect of the Addition of Ni Element in a Bulk Amorphous Zr-Cu-Al Alloy
• Rotating-Beam Fatigue Properties of Pd_Cu_Ni_P_ Bulk Glassy Alloy
• Enhancement of Ductility and Plasticity of Zn_Cu_Al_Ni_5 Bulk Glassy Alloy by Cold Rolling
• Growth of a Single Al_Cu_Fe_ Icosahedral Quasicrystal Using the Czochralski Method and Annealing Removal of Strains
• Fatigue Properties and Microstructures of Zr_Cu_Al_Ni_5 Bulk Glassy Alloys
• Preparation of Large Grained AL_Cu_Fe_ Icosahedral Quasivrystal Directly from the Melt
• Growth of Icosahedral Single Quasicrystal and 1/1-Cubic Approximant Single Crystal in an Al-Li-Cu Alloy System by the Czodhralski Method
• Nanocrystalline Zr-Based Bulk Glassy Alloys with High Flexural Strength
• Rotating-Beam Fatigue Strength of Pd_ Cu_ Ni_ P_ Bulk Amorphous Alloy
• New Method to Increase Solid Precursor Vaporization for Metalorganic Chemical Vapor Deposition
• New Liquid Precursors of Yttrium and Neodymium for Metalorganic Chemical Vapor Deposition
• c-Axis-Correlated Vortex Pinning Center Induced by Dilute Co-doping in Pulsed-Laser-Deposition-ErBa_2Cu_3O_y Films
• Enhancement of Flux-Pinning in Epitaxial Sm_Ba_Cu_3O_y Films by Introduction of Low-T_c Nanoparticles
• High-Critical-Current-Density SmBa_2Cu_3O_ Films Induced by Surface Nanoparticle
• Thermal Decompositiom of Ce0_2 in Ultra High Vacuum as a Cause of Polycrystalline Growth of Si Films on Epitaxial Ce0_2/Si
• Low-Temperature Epitaxial Growth of CeO_2(110)/Si(100) Structure by Evaporation under Substrate Bias
• Analysis of Misoriented Crystal Structure by Ion Channeling Observed Using Ion-Induced Secondary Electrons
• Highly Accurate CO_2 Gas Sensor Using a Modulation-Type Pyroelectric Infrared Detector
• Preparation of YBa_2Cu_3O_ Thin Films by Metal-Organic Chemical Vapor Deposition Using Liquid Sources
• Rare Earth Substitution Effects and Magnetic Field Dependence of Critical Current in Y_RE_xBa_2Cu_3O_y Coated Conductors with Nanoparticles (RE = Sm, Gd)
• Enhancement of Flux Pinning in Y_Sm_xBa_Cu_3O_y Coated Conductors with Nanoparticles
• Specimen preparation for high-resolution transmission electron microscopy using focused ion beam and Ar ion milling
• Structural Characterization of High-Quality ZnS Epitaxial Layers Grown on GaAs Substrates by Low-Pressure Metalorganic Chemical Vapor Deposition : Surfaces, Interfaces, and Films
• Evaluation of Thermal Expansion Coefficient of Twinned YBa_2Cu_3O_7-δ Film for Prediction of Crack Formation of Various Substrates
• Optical characterization of high-quality ZnS epitaxial films grown by low-pressure metalorganic chemical vapor deposition
• Intense Ultraviolet Electroluminescence Properties of the High-Power InGaN-Based Light-Emitting Diodes Fabricated on Patterned Sapphire Substrates
• Fabrication of REBa_2Cu_3O_x (RE=Y, Nd) Films on Yttria-Stabilized Zirconia by Liquid Phase Epitaxial Method with Ba-Cu-O-F Flux
• Intense Ultraviolet Electroluminescence Properties of the High-Power InGaN-Based LEDs Fabricated on Patterned Sapphire Substrates
• Effect of Nd422 Addition on Jc in Nd123 Melt-Textured Bulk Superconductor
• Pulsed Field Magnetization of Melt-Processed Y-Ba-Cu-O Bulk Superconductor with No Weak Links
• High-Temperature Superconducting Motor Using Y-Ba-Cu-O Bulk Magnets
• Evidence of Mobile Ag and Growth Mechanism of YBa_2Cu_3O_7-y Films Deposited on Cube Textured Ag Tape by Chemical Vapor Deposition
• Spiral Growth of YBa_2Cu_3O_ Thin Films by Metalorganic Chemical Vapor Deposition Using Liquid-State Sources
• Fabrication of Tungsten-Carbon Multilayers for Soft X-Ray Optics Using Excimer-Laser-Induced Chemical Vapor Deposition Technique
• RBS/Channeling Study of the Crystallographic Correlation for Epitaxial CeO_2 on Si
• Structural Analysis for Water Absorption of SiOF Films Prepared by High-Density-Plasma Chemical Vapor Deposition
• Structural and Electrical Properties for Fluorine-Doped Silicon Oxide Films Prepared by Biased Helicon-Plasma Chemical Vapor Deposition
• Creep Deformation of Single Al-Ni-Co Decagonal Quasicrystals
• Strain Affected Properties of Icosahedral Al-Pd-Mn Single Ingot
• Preparation of a Decagonal Al-Cu-Co Single Quasicrystal by the Czochralski Method
• High-Sensitivity Channeling Analysis of Lattice Disorder Near Surfaces Using Secondary Electrons Induced by Fast Ions
• Influence of Gas Desorption from SiOF Film Prepared by High-Density-Plasma Chemical Vapor Deposition upon TiN/Ti Film
• Improvement in Characteristics of Polycrystalline Silicon Thin-Film Transistors by Heating with High-Pressure H_2O Vapor
• Heat Theatment of Amorphous and Polycrystalline Silicon Thin Films with High-Pressure H_2O Vapor
• Heat Treatment of Amorphous and Polycrystalline Silicon Thin Films with H_20 Vapor
• Structural and Electrical Properties for Fluorine-Doped Silicon Oxide Films Prepared by Biased Helicon-Plasma CVD
• Characterization of Stable Fluorine-Doped Silicon Oxide Film Prepared by Biased Helicon Plasma Chemical Vapor Deposition
• Electrical Characteristics of Metal/Cerium Dioxide/Silicon Structures
• Quantitative Analysis of Oxygen Deficiency in Epitaxial CeO_2 Layers on Siby Detecting ^O Added for Stoichiometry
• Intermediate Amorphous Layer Formation Mechanism at the Interface of Epitaxial CeO_2 Layers and Si Substrates
• Electrical and Optical Properties of Poly (p-phenylene) Film and Their Doping Effect
• Characteristics of Rechargeable Battery Using Conducting Poly(p-phenylene) Film
• Highly Conducting Polypyrrole Prepared by Electrochemical Oxidation Method in Aqueous Solution
• Asymmetry of the Quadrupole Satellite Lines of ^Na in NaNO_2
• Nitriding of Evaporated-Ti Thin Films by Ion Implantation
• Epitaxial Growth of Vanadium Films Evaporated on NaCl Substrates
• Texture Structure Analysis and Crystalline Quality Improvement of CeO_2(110) Layers Grown on Si(100) Substrates
• Correlation between Anomalous Peak Effect in Magnetic Hysteresis Loop and Nanoscale Structure for NdBa_2Cu_3O_ Single-Crystal Superconductor
• Anisotropic Diamagnetic Susceptibility of AlNiCo Quasi-crystal
• Fabrication of Fe-Based Metallic Glass Particle Reinforced Al-Based Composite Materials by Friction Stir Processing
• Interface Microstructure and Mechanical Properties of Dissimilar Friction Stir Welded Joints between Zr_Cu_Ni_5Al_ Bulk Metallic Glass and Pure Al

もっと見る 閉じる

スポンサーリンク