Microbeam Line of MeV Heavy Ions for Materials Modification and In-Situ Analysis
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-11-20
著者
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Satoh Minoru
Nagaoka University Of Technology
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Horino Y
Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)
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Satoh M
Tohoku Univ. Sendai Jpn
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TAKAI Mikio
Faculty of Engineering Science, and Research Center for Extreme Materials, Osaka University
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CHAYAHARA Akiyoshi
Government Industrial Research Institute
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KIUCHI Masato
Government Industrial Research Institute
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HORINO Yuji
Government Industrial Research Institute
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FUJII Kanenaga
Government Industrial Research Institute
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SATOH Mamoru
Government Industrial Research Institute Osaka
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HORINO Yuji
National Institute of Advanced Industrial Science and Technology
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Horiba Yasutaka
System Lsi Laboratory Mitsubishi Electric Corporation
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Chayahara Akiyoshi
Department Of Electrical Engineering Hiroshima University
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Hirano Y
Advanced Device Development Dept. Renesas Technology Corp.
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Kiuchi M
National Inst. Advanced Industrial Sci. And Technol. Osaka Jpn
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Horino Yuji
National Inst. Of Advanced Industrial Sci. And Technol. Kansai Osaka Jpn
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Takai Mikio
Faculty Of Engineering Science And Research Center For Extreme Materials (rcem) Osaka University
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