Formation of High Purity films by Negative Ion Beam Sputtering Using an Ultra-high Vacuum Self-Sputtering Method

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概要

• 論文の詳細を見る
• Japan Institute of Metalsの論文
• 2000-01-20

著者

• Horino Y

  Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)

• CHAYAHARA Akiyoshi

  Department of Electrical Engineering, Faculty of Engineering, Hiroshima University

• HORINO Yuji

  National Institute of Advanced Industrial Science and Technology

• TSUBOUCHI Nobuteru

  Laboratory of Purified Materials, National Institute of Advanced Industrial Science and Technology

• CHAYAHARA Akiyoshi

  Laboratory of Purified Materials, National Institute of Advanced Industrial Science and Technology

• KINOMURA Atsushi

  National Institute of Advanced Industrial Science and Technology

• KINOMURA Atsushi

  Department of Materials Physics, Osaka National Research Institute

• TSUBOUCHI Nobuteru

  Department of Materials Physics, Osaka National Research Institute

• HECK Claire

  Department of Materials Physics, Osaka National Research Institute

• HORINO Yuji

  Department of Materials Physics, Osaka National Research Institute

• Horiba Yasutaka

  System Lsi Laboratory Mitsubishi Electric Corporation

• CHAYAHARA Akiyoshi

  AIST Kansai

• Chayahara Akiyoshi

  Department Of Electrical Engineering Hiroshima University

• Chayahara Akiyoshi

  Government Industrial Research Institute Osaka

• Heck Claire

  National Institute Of Advanced Industrial Science And Technology Aist Kansai Laboratory Of Purified

• Hirano Y

  Advanced Device Development Dept. Renesas Technology Corp.

• Horino Yuji

  National Inst. Of Advanced Industrial Sci. And Technol. Kansai Osaka Jpn

• Horino Yuji

  Department Of Crystalline Materials Science Faculty Of Engineering Nagoya University

• Kinomura A

  National Institute Of Advanced Industrial Science And Technology

• Tsubouchi Nobuteru

  Laboratory Of Purified Materials National Institute Of Advanced Industrial Science And Technology

• Tsubouchi Nobuteru

  Department Of Material Physics Osaka National Research Institute

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