Fabrication of 1 Inch Mosaic Crystal Diamond Wafers
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2010-05-25
著者
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SHIKATA Shin-ichi
Diamond SAW Device Project, Sumitomo Electric Industries Ltd.
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UMEZAWA Hitoshi
Diamond Research Center, AIST
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YAMADA Hideaki
Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
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CHAYAHARA Akiyoshi
Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
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MOKUNO Yoshiaki
Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
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FUJIMORI Naoji
Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
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Fujimori Naoji
Diamond Research Center National Institute Of Advanced Industrial Science And Technology
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Fujimori Naoji
Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)
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CHAYAHARA Akiyoshi
AIST Kansai
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Chayahara Akiyoshi
Department Of Electrical Engineering Hiroshima University
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Umezawa Hitoshi
Diamond Research Center Aist
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Umezawa Hitoshi
Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)
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Shikata Shin-ichi
Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)
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Mokuno Yoshiaki
Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)
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Chayahara Akiyoshi
Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)
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Yamada Hideaki
Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)
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Fujimori Naoji
Diamond Research Center Aist
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Umezawa Hitoshi
Diamond Res. Lab, National Inst. of Advanced Industrial Sci.
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- High-Dose Implantation of MeV Carbon Ion into Silicon
- Three-Dimensional Analysis of Locally Implanted Atoms by MeV Helium Ion Microprobe
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- Model of Reactive Microwave Plasma Discharge for Growth of Single-Crystal Diamond
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