Molecular Dynamics Simulations of Organic Polymer Dry Etching at High Substrate Temperatures
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概要
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Molecular dynamics simulations of hydrocarbon beam injections into a poly(1,4-phenylene) substrate surface have been carried out at high substrate temperatures up to 600 K. As in a previous study [H. Yamada and S. Hamaguchi: J. Appl. Phys. 96 (2004) 6147] for the substrate at room temperature, classical multibody potential functions are used for covalent bonds of carbon and hydrogen atoms and a Lennard-Jones potential function for Van der Waals interactions. Hydrogen atoms provided by the beam tend to chemically break carbon bonds in the substrate whereas large momenta carried by energetic carbon atoms tend to sputter weakly bound surface atoms/atomic clusters from the substrate. It has been also observed that larger hydrocarbon clusters are more frequently sputtered at higher substrate temperatures.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-04-15
著者
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Hamaguchi Satoshi
Center For Atomic And Molecular Technologies Graduate School Of Engineering Osaka University
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Yamashiro Masashi
Center For Atomic And Molecular Technologies Graduate School Of Engineering Osaka University
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Yamada Hideaki
Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)
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Yamashiro Masashi
Center for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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Hamaguchi Satoshi
Center for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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