Fabrication of Single Crystalline Diamond Triode Electron Emitter
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概要
- 論文の詳細を見る
A novel and simple technique is proposed for the fabrication of gated single crystalline diamond Spindt-type emitter array with a small and precise gate aperture. An interesting silicon oxide deposition pattern ‘sphere on cone’ enabled controlled gate opening by wet chemical etching. Using this technique a highly uniform Spindt-type emitter array with a specified gate aperture of 1.4 μm has been fabricated. Study on controlled field emission indicates the normal operation of the fabricated emitter.
- Japan Society of Applied Physicsの論文
- 2005-04-10
著者
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Vinod Purayath
Diamond Research Center National Institute Of Advanced Industrial Science And Technology
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FUJIMORI Naoji
Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
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Fujimori Naoji
Diamond Research Center National Institute Of Advanced Industrial Science And Technology
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Yamada Takatoshi
Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)
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Yamada Takatoshi
Diamond Research Center National Institute Of Advanced Industrial Science And Technology
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Yamada Takatoshi
Diamond Research Center Advanced Industrial Science And Technology
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Hwang Doo-sup
Diamond Research Center National Institute Of Advanced Industrial Science And Technology
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Fujimori Naoji
Diamond Research Center Aist
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