Qualitative Correspondences of Experimentally Obtained Growth Rates and Morphology of Single-Crystal Diamond with Numerical Predictions of Plasma and Gas Dynamics in Microwave Discharges for Various Substrate Holder Shapes

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-10-30

著者

• SHIKATA Shin-ichi

  Diamond SAW Device Project, Sumitomo Electric Industries Ltd.

• Horino Y

  Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)

• YAMADA Hideaki

  Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST)

• CHAYAHARA Akiyoshi

  Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST)

• MOKUNO Yoshiaki

  Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST)

• SODA Yousuke

  Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST)

• HORINO Yuji

  Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST)

• FUJIMORI Naoji

  Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST)

• CHAYAHARA Akiyoshi

  AIST Kansai

• Chayahara Akiyoshi

  Department Of Electrical Engineering Hiroshima University

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• Focused High-Energy Heavy Ion Beams
• Surface Structure of Ion-Implanted Silica Glass
• Tomography of Microstructures by Scanning Micro-RBS Probe
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