Well Structure by High-Energy Boron Implantation for Soft-Error Reduction in Dynamic Random Access Memories (DRAMs)

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-12-30

著者

• Park Y‐k

  Samsung Electronics Gyeonggi‐do Kor

• Horino Y

  Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)

• NISHIMURA Tadashi

  ULSI Laboratory, Mitsubishi Electric Corporation

• Horino Y

  Advanced Device Development Dept. Renesas Technology Corp.

• TAKAI Mikio

  Faculty of Engineering Science, and Research Center for Extreme Materials, Osaka University

• Takai M

  Research Center For Materials Science At Extreme Conditions And Graduate School Of Engineering Scien

• Ohno Y

  Nagoya Univ. Naogya Jpn

• Ohno Yoshikazu

  Ulsi Laboratory Mitsubishi Electric Corporation

• KISHIMOTO Takehisa

  Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University

• PARK Yang-Keun

  Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University

• SONODA Kenichirou

  ULSI Laboratory, Mitsubishi Electric Corporation

• SAYAMA Hirokazu

  ULSI Laboratory, Mitsubishi Electric Corporation

• KINOMURA Atsushi

  Osaka National Research Institute, AIST

• HORINO Yuji

  Osaka National Research Institute, AIST

• FUJII Kanenaga

  Osaka National Research Institute, AIST

• HORINO Yuji

  National Institute of Advanced Industrial Science and Technology

• KINOMURA Atsushi

  National Institute of Advanced Industrial Science and Technology

• Horiba Yasutaka

  System Lsi Laboratory Mitsubishi Electric Corporation

• Nishimura Tadashi

  The Ulsi Development Center Mitsubishi Electric Corporation

• Nishimura Tadashi

  Ulsi Research And Development Center Mitsubishi Electric Corporation

• Sayama H

  Mitsubishi Electric Corp. Hyogo Jpn

• Sayama Hirokazu

  Ulsi Development Center Mitsubishi Electric Corporation

• Kishimoto T

  Department Of Physics Osaka University

• Kishimoto T

  Department Of Electrical Engineering Waseda University

• Horino Yuji

  National Inst. Of Advanced Industrial Sci. And Technol. Kansai Osaka Jpn

• Takai Mikio

  Faculty Of Engineering Science And Research Center For Extreme Materials (rcem) Osaka University

• Kinomura A

  National Institute Of Advanced Industrial Science And Technology

• Sonoda K

  Ulsi Development Center Mitsubishi Electric Corporation

• Takai Mikio

  Faculty Of Engineering Science And Reseatch Center For Extreme Materials

• Nishimura Tadashi

  Ulsi Development Center Mitsubishi Electric Corporation

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