Prototyping of Field Emitter Array Using Focused Ion and Electron Beams
スポンサーリンク
概要
- 論文の詳細を見る
Au-gated Pt field-emitter arrays (FEAs) were fabricated using focused ion and electron beams. The gate opening in Au layers was produced by physical sputtering using focused ion beams (FIBs) and subsequent wet etching of the underlying silicon dioxide layer. Deposition of a platinum pyramid-shaped emitter into the gate opening using electron beams (EBs) induced a chemical reaction producing field emission without any thermal annealing process. Pt emitters with different heights of a Au-gated field emitter array were studied. The electron emission currents are about 1 and 10 μA for the emitter tip heights of 570 and 760 nm, respectively. Consequently, the height of the emitter must be adjusted to the top surface of gate apertures for optimization of emission behavior.
- 社団法人応用物理学会の論文
- 2002-06-30
著者
-
Okuda S
Mitsubishi Electric Corp. Hyogo Jpn
-
Takai M
Research Center For Materials Science At Extreme Conditions And Graduate School Of Engineering Scien
-
JARUPOONPHOL Werapong
大阪大学大学院 基礎工学研究科
-
Hosono A
Advanced Technology R&d Center Mitsubishi Electric Corporation
-
Hosono Akihiko
Faculty Of Engineering Yokohama National University:(present Address) Isuzu Motor Co. Ltd.
-
Hosono Akihiko
Advanced Technology R&d Center Mitsubishi Electric Corp.
-
Takai Mikio
Research Center For Environmental Genomics Kobe University
-
Okuda Soichiro
Advanced Technology R&d Center Mitsubishi Electric Corp.
-
JARUPOONPHOL Werapong
Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Scien
-
OCHIAI Chikako
Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Scien
-
Ochiai Chikako
Research Center For Materials Science At Extreme Conditions And Graduate School Of Engineering Scien
-
Takai Mikio
Faculty Of Engineering Science And Reseatch Center For Extreme Materials
-
Jarupoonphol Werapong
Research Center For Materials Science At Extreme Conditions And Graduate School Of Engineering Scien
関連論文
- Characteristics of the Switching in a Superconducting Y-Ba-Cu-O Thin Film by Laser Irradiation
- Direct Measurement of Transient Drain Currents in Partially-Depleted SOI N-Channel MOSFETs Using a Nuclear Microprobe for Highly Reliable Device Designs
- Effective Combination of Stimulating Coils for Magnetic Heart Stimulation
- Heart Stimulation by Time-Varying Magnetic Fields
- Stimulation of Dog Heart by Pulsed Magnetic Fields
- Control of Carrier Collection Efficiency in n+p Diode with Retrograde Well and Epitaxial Layers
- Control of Carrier Collection Efficiency in n^+p Diode with Retrograde Well and Epitaxial Layers
- Well Structure by High-Energy Boron Implantation for Soft-Error Reduction in Dynamic Random Access Memories (DRAMs)
- Optimization of field emitter array fabricated using beam assisted process
- Optimization of field emitter array fabricated using beam assisted process(電子管と真空ナノエレクトロニクス及びその評価技術)
- Optimization of field emitter array fabricated using beam assisted process
- マスクレスビームプロセスによるナノ電子源構造の試作
- マスクレスビームプロセスによるナノ電子源構造の試作
- Improvement of Lighting Uniformity in Field Emission Display with Carbon Nano-Tube Cathodes
- Laser-Induced Etching of Mn-Zn ferrite and Its Application : Etching and Deposition Technology
- Microprobe Analysis of Pt Films Deposited by Beam Induced Reaction
- Microprobe Analysis of Pt Films Deposited by Beam Induced Reaction
- Microanalysis of Impurity Contamination in Masklessly Etched Area Using Focused Ion Beam
- Microanalysis of Impurity Contamination in Masklessly Etched Area Using Focused Ion Beam
- Well Structure by High Energy Boron Implantation for Soft Error Reduction in DRAMs
- Wavelength Dependence of Laser Cleaning for Field Emitter Arrays
- Pulsed Laser Deposition of Diamond-Like Carbon Films on Gated Si Field Emitter Arrays for Improved Electron Emission
- Single Event Upset in Static Random Access Memories in Atmospheric Neutron Environments
- Experimental Investigation of Thermal Neutron-Induced Single Event Upset in Static Random Access Memories : Semiconductors
- Electron-Beam-Induced Deposition of Pt for Field Emitter Arrays
- Electron Beam Induced Deposition of Pt for Field Emitter Arrays
- High-Speed Maskless Laser Patterning of Thin Films for Giant Microelectronics
- Macropore Formation in AnodiZed p-Type Silicon : Semiconductors
- Development of Electron Gun for High Brightness CRT(CRT Technology)(Electronic Displays)
- Development of Electron Gun for High Brightness CRT
- Low Driving Voltage Electron Gun for Multimedia CRT(Special Issue on Electronic Displays)
- 19 inch 100-Degree Deflection Yoke for Flat CRT (情報ディスプレイ--The 6th Asian Symposium on Information Display & Exhibition)
- 19inch 100-Degree Deflection Yoke for Flat CRT
- Simulation Designing and Experiment of Low Aberration Lens Systems for Color Display Tubes (Special Issue on Electronic Displays)
- Molecular and Immunochemical Characteristics of Monoclonal and Recombinant Antibodies Specific to Bisphenol A(Analytical Chemistry)
- Field Emission Characteristics of Screen-Printed Carbon Nanotube After Laser Irradiatio
- Field Emission Characteristics of Screen-Printed Carbon Nanotube After Laser Irradiation
- Single Event Upset in Static Random Access Memories in Atmospheric Neutron Environments
- Prototyping of Field Emitter Array Using Focused Ion and Electron Beams
- Prototyping of Field emitter Array Using Focused Ion and Electron Beams
- Experiment Investigation of Thermal Neutron-Induced Single Event Upset in Static Random Access Memories
- Surface Structure of Sulfur-Terminated GaAs by Medium Energy Ion Scattering
- Evaluation of Fast Neutron Induced Single Event Upset in a Static Random Access Memory and Simulation by Monte Carlo N-Particle Code (MCNPX)
- Wavelength Dependence of UV Laser Cleaning for Silicon Field Emitter Arrays
- Fabrication of Nano Electron Source Using Beam-Assisted Process
- Mask Pattern Correction by Energy Loss Compensation in Extreme Ultraviolet Lithography
- Analysis of Asymmetry of Printed Image by Off-Axis Incident Light onto Reflective Mask in Extreme Ultraviolet Lithography
- Growth of Carbon Nanotube by Thermal Chemical Vapor Deposition at Low Temperature with FeZrN Film
- Transport Properties of Pt Nanowires Fabricated by Beam-Induced Deposition
- Effect of Solvent in Anodic Solution on Photoluminescence in Anodized p-Type Porous Silicon
- Influence of Elastic Scattering on the Neutron-Induced Single-Event Upsets in a Static Random Access Memory