The Effects on Metal Oxide Semiconductor Field Effect Transistor Properties of Nitrogen Implantation into p^+ Polysilicon Gate

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-02-15

著者

• INUISHI Masahide

  ULSI Laboratory, Mitsubishi Electric Corporation

• NISHIMURA Tadashi

  ULSI Laboratory, Mitsubishi Electric Corporation

• INOUE Yasuo

  ULSI Development Center, Mitsubishi Electric Corporation

• YASUOKA Akihiko

  ULSI Laboratory, Mitsubishi Electric Corporation

• MIYOSHI Hirokazu

  ULSI Laboratory, Mitsubishi Electric Corporation

• INUISHI Masahide

  Advanced Device Development Dept., Renesas Technology Corp.

• Inoue Y

  National Defense Acad. Yokosuka Jpn

• KUROI Takashi

  ULSI Development Center, Mitsubishi Electric Corporation

• SHIMIZU Satoshi

  ULSI Laboratory, Mitsubishi Electric Corporation

• SHIRAHATA Masayoshi

  ULSI Development Center, Mitsubishi Electric Corporation

• Yasuoka Akihiko

  Ulsi Laboratory Mitsubishi Electric Corporation

• Miyoshi Hirokazu

  Ulsi Laboratory Mitsubishi Electric Corporation

• Nishimura Tadashi

  The Ulsi Development Center Mitsubishi Electric Corporation

• Nishimura Tadashi

  Ulsi Research And Development Center Mitsubishi Electric Corporation

• Okumura Yoshihiro

  Research Institute Of Electronics Shizuoka University

• OKUMURA Yoshinori

  ULSI Laboratory, Mitsubishi Electric Corporation

• Inoue Y

  Ntt Access Network Service Systems Laboratories Ntt Corporation

• Kuroi T

  Ulsi Development Center Mitsubishi Electric Corporation

• Kuroi Takashi

  Ulsi Development Center Mitsubishi Electric Corporation

• Okumura Y

  Minolta Co. Ltd. Osaka Jpn

• Miyoshi H

  Mitsubishi Electric Corp.

• Miyoshi Hirokazu

  徳島大学医学部

• Shimizu Satoshi

  Graduate School Tokyo Institute Of Technology

• Inuishi Masahide

  Advanced Device Development Dept. Renesas Technology Corp.

• Inuishi Masahide

  Ulsi Development Center Mitsubishi Electric Corporation

• Shirahata M

  Ulsi Laboratory Mitsubishi Electric Corporation

• Shirahata Masayoshi

  Ulsi Development Center Mitsubishi Electric Corporation

• Inoue Yasuo

  Ulsi Development Center Mitsubishi Electric Corporation

• Shimizu Satoshi

  Ulsi Laboratory Mitsubishi Electric Corporation

• Nishimura Tadashi

  Ulsi Development Center Mitsubishi Electric Corporation

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