Direct Measurement of Transient Drain Currents in Partially-Depleted SOI N-Channel MOSFETs Using a Nuclear Microprobe for Highly Reliable Device Designs

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-04-30

著者

• YAMAGUCHI Yasuo

  Institute for Materials Research, Tohoku University

• Hirao T

  Advanced Device Development Dept. Renesas Technology Corp.

• Yamaguchi Y

  Tohoku Univ. Sendai

• Yamaguchi Y

  Kumamoto Techno Res. Park Kumamoto Jpn

• IWAMATSU Toshiaki

  ULSI Laboratory, Mitsubishi Electric Corporation

• NAKAYAMA Kouichi

  Research Center for Materials Science at Extreme Conditions, Osaka University

• TAKAOKA Hiromichi

  Research Center for Materials Science at Extreme Conditions, Osaka University

• TAKAI Mikio

  Research Center for Materials Science at Extreme Conditions, Osaka University

• YAMAGUCHI Yasuo

  ULSI Laboratory, Mitsubishi Electric Corporation

• MAEGAWA Shigeto

  ULSI Laboratory, Mitsubishi Electric Corporation

• INUISHI Masahide

  ULSI Laboratory, Mitsubishi Electric Corporation

• KINOMURA Atsushi

  ONRI, AIST

• HORINO Yuji

  ONRI, AIST

• NISHIMURA Tadashi

  ULSI Laboratory, Mitsubishi Electric Corporation

• Horino Y

  Advanced Device Development Dept. Renesas Technology Corp.

• IWAMATSU Toshiaki

  Advanced Device Development Dept., Renesas Technology Corp.

• INUISHI Masahide

  Advanced Device Development Dept., Renesas Technology Corp.

• Maegawa Shigeto

  Advanced Device Development Dept. Renesas Technology Corp.

• HORIBA Yasutaka

  The authors are with Kita-Itami Works, Mitsubishi Electric Corporation

• Takai M

  Research Center For Materials Science At Extreme Conditions And Graduate School Of Engineering Scien

• Yamaguchi Y

  Central Workshop Osaka University

• KINOMURA Atsushi

  National Institute of Advanced Industrial Science and Technology

• Nakayama Kazuhiko

  Mechanical Processing Technology Research Laboratories Kao Corporation

• Maegawa Shigeto

  Ulsi Development Center Mitsubishi Electric Corporation

• Horiba Yasutaka

  Lsi Laboratory Mitsubishi Electric Corporation

• Horiba Yasutaka

  The Authors Are With Kita-itami Works Mitsubishi Electric Corporation

• Horiba Yasutaka

  System Lsi Laboratory Mitsubishi Electric Corporation

• Nishimura Tadashi

  The Ulsi Development Center Mitsubishi Electric Corporation

• Nishimura Tadashi

  Ulsi Research And Development Center Mitsubishi Electric Corporation

• Iwamatsu Toshiaki

  Advanced Device Development Dept. Renesas Technology Corp.

• Nakayama K

  National Inst. Advanced Industrial Technol. And Sci. Ibaraki Jpn

• Inuishi Masahide

  Advanced Device Development Dept. Renesas Technology Corp.

• Inuishi Masahide

  Ulsi Development Center Mitsubishi Electric Corporation

• Kinomura A

  National Institute Of Advanced Industrial Science And Technology

• Takai Mikio

  Research Center For Environmental Genomics Kobe University

• Takai Mikio

  Faculty Of Engineering Science And Reseatch Center For Extreme Materials

• Nishimura Tadashi

  Ulsi Development Center Mitsubishi Electric Corporation

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