Microprobe Analysis of Pt Films Deposited by Beam Induced Reaction
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-12-30
著者
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Park Y‐k
Samsung Electronics Gyeonggi‐do Kor
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TAKAI Mikio
Research Center for Materials Science at Extreme Conditions, Osaka University
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Takai M
Research Center For Materials Science At Extreme Conditions And Graduate School Of Engineering Scien
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PARK Yang-Neun
Research Center for Materials Science at Extreme Conditions, Osaka University
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LEHRER Christoph
Fraunhofer Institut fuer Integrierte Schaltungen
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FREY Lothar
Fraunhofer Institut fuer Integrierte Schaltungen
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RYSSEL Heiner
Fraunhofer Institut fuer Integrierte Schaltungen
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PARK Yang-Keun
Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Scien
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Ryssel Heiner
The Fraunhofer Institut Fur Integrierte Schaltungen Bauelementetechologie
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Takai Mikio
Research Center For Environmental Genomics Kobe University
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Takai Mikio
Faculty Of Engineering Science And Reseatch Center For Extreme Materials
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