Microanalysis of Impurity Contamination in Masklessly Etched Area Using Focused Ion Beam
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-12-30
著者
-
Park Y‐k
Samsung Electronics Gyeonggi‐do Kor
-
TAKAI Mikio
Research Center for Materials Science at Extreme Conditions, Osaka University
-
Takai M
Research Center For Materials Science At Extreme Conditions And Graduate School Of Engineering Scien
-
KISHIMOTO Takehisa
Research Center for Materials Science at Extreme Conditions and Faculty of Engineering Science, Osak
-
LEHRER Christoph
Fraunhofer Institut fuer Integrierte Schaltungen
-
FREY Lothar
Fraunhofer Institut fuer Integrierte Schaltungen
-
RYSSEL Heiner
Fraunhofer Institut fuer Integrierte Schaltungen
-
PARK Yang-Keun
Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Scien
-
NAGAI Takaaki
Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Scien
-
Nagai Tomonori
Department Of Electronics And Information Science Teikyo University Of Science And Technology
-
Nagai T
Department Earth And Space Science Graduate School Of Science Osaka University
-
Ryssel Heiner
The Fraunhofer Institut Fur Integrierte Schaltungen Bauelementetechologie
-
Kishimoto T
Department Of Physics Osaka University
-
Kishimoto T
Department Of Electrical Engineering Waseda University
-
Takai Mikio
Research Center For Environmental Genomics Kobe University
-
Takai Mikio
Faculty Of Engineering Science And Reseatch Center For Extreme Materials
関連論文
- Direct Measurement of Transient Drain Currents in Partially-Depleted SOI N-Channel MOSFETs Using a Nuclear Microprobe for Highly Reliable Device Designs
- 31a-Y-12 Λ Nucleon Interaction in Nuclei Probed by the quasifree(π^+, K^+) reaction on ^C
- Control of Carrier Collection Efficiency in n+p Diode with Retrograde Well and Epitaxial Layers
- Control of Carrier Collection Efficiency in n^+p Diode with Retrograde Well and Epitaxial Layers
- Well Structure by High-Energy Boron Implantation for Soft-Error Reduction in Dynamic Random Access Memories (DRAMs)
- Estimation of Carrier Suppression by High-Energy Boron-Implanted Layer for Soft Error Reduction
- Laser-Induced Etching of Mn-Zn ferrite and Its Application : Etching and Deposition Technology
- Effect of Y Substitution for Ca in Bi_2Sr_2CaCu_2O_ Superconducting Films Prepared by Liquid Phase Epitaxial Method
- X-ray Photoelectron Spectroscopy Study in Bi_2Sr_2Ca_Nd_xCu_2O_
- Effect of Ni Substitution for Cu in 110 K Phase of (Bi, Pb)-Sr-Ca-Cu-O Superconductors
- Effect of Y Substitution for the Ca Site in the 110 K Phase of (Bi, Pb)-Sr-Ca-Cu-O Superconductors
- Morphological Study on the Circle of Willis in Japanese
- Microprobe Analysis of Pt Films Deposited by Beam Induced Reaction
- Microprobe Analysis of Pt Films Deposited by Beam Induced Reaction
- Microanalysis of Impurity Contamination in Masklessly Etched Area Using Focused Ion Beam
- Microanalysis of Impurity Contamination in Masklessly Etched Area Using Focused Ion Beam
- Well Structure by High Energy Boron Implantation for Soft Error Reduction in DRAMs
- Chemical-Vapor Deposition of OH-free and Low-k Organic-Silica Films
- Formation of an Atomically Abrupt Si/Ge Hetero-Interface
- Formation of Atomically Abrupt Si/Ge Hetero-Interface
- A Proposed Atomic-Layer-Deposition of Germanium on Si Surface
- A Proposed Atomic-Layer-Deposition of Germanium on Si(100)
- Pressure Dependence of Effective Pair Potentials in AgBr Determined by Extended X-Ray Absorption Fine Structure
- Effective Pair Potentials of NaCl-and CsCl-type KBr Determined by X-Ray Absorption Fine Structure under Pressure
- Dielectric Properties of Pb(Zr, Ti)O_3-Dispersed MgO Nanocomposite
- Structural Changes in Ba(Sr_Ta_)O_3-Type Perovskite Compounds upon Tilting of Oxygen Octahedra
- Anomaly in the Infrared Active Phonon Modes and Its Relationship to the Dielectric Constant of (Ba_Sr_x)(Mg_Ta_)O_3 Compound
- Anomaly of Dielectric Constant of (Ba_Sr_x)(Mg_Ta_)O_3 Solid Solution and Its Relation to Structural Change
- Wavelength Dependence of Laser Cleaning for Field Emitter Arrays
- Pulsed Laser Deposition of Diamond-Like Carbon Films on Gated Si Field Emitter Arrays for Improved Electron Emission
- Evaluation of Fast Neutron Induced Single Event Upset in a Static Random Access Memory and Simulation by Monte Carlo N-Particle Code (MCNPX)
- Single Event Upset in Static Random Access Memories in Atmospheric Neutron Environments
- Experimental Investigation of Thermal Neutron-Induced Single Event Upset in Static Random Access Memories : Semiconductors
- Electron-Beam-Induced Deposition of Pt for Field Emitter Arrays
- Electron Beam Induced Deposition of Pt for Field Emitter Arrays
- Analysis of Asymmetry of Printed Image by Off-Axis Incident Light onto Reflective Mask in Extreme Ultraviolet Lithography
- Mask Pattern Correction by Energy Loss Compensation in Extreme Ultraviolet Lithography
- Development of Highly Stable Synchrotron Radiation Source at SORTEC : X-Ray Lithography
- Development of Highly Stable Synchrotron Radiation Source at SORTEC
- Transport Properties of Pt Nanowires Fabricated by Beam-Induced Deposition
- High-Speed Maskless Laser Patterning of Thin Films for Giant Microelectronics
- Molecular and Immunochemical Characteristics of Monoclonal and Recombinant Antibodies Specific to Bisphenol A(Analytical Chemistry)
- Field Emission Characteristics of Screen-Printed Carbon Nanotube After Laser Irradiatio
- Field Emission Characteristics of Screen-Printed Carbon Nanotube After Laser Irradiation
- Acute Massive Pulmonary Thromboembolism Associated With Risperidone and Conventional Phenothiazines
- Glassy cell carcinoma of the uterine cervix responsive to neoadjuvant intraarterial chemotherapy
- Single Event Upset in Static Random Access Memories in Atmospheric Neutron Environments
- Prototyping of Field Emitter Array Using Focused Ion and Electron Beams
- Prototyping of Field emitter Array Using Focused Ion and Electron Beams
- Experiment Investigation of Thermal Neutron-Induced Single Event Upset in Static Random Access Memories
- Surface Structure of Sulfur-Terminated GaAs by Medium Energy Ion Scattering
- A Computationally Efficient Method for Three-Dimensional Simulation of Ion Implantation (Special lssue on SISPAD'99)
- Massive Pulmonary Thromboembolism Demonstrated at Necropsy in Japanese Psychiatric Patients Treated With Neuroleptics Including Atypical Antipsychotics
- Evaluation of the Point Defect Bulk Recombination Rate by Ion Implantation at High Temperatures
- Effect of Surface Treatments on Repair Bond Strength of Aged Light Polymerizing Indirect Composites
- The Effect of Surface Treatment on Bending Bond Strength of Repair Resins to Light and Heat Cure Type Prosthetic Composites Immersed in Water for One Year
- Transmission-Electron-Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition
- Evaluation of Fast Neutron Induced Single Event Upset in a Static Random Access Memory and Simulation by Monte Carlo N-Particle Code (MCNPX)
- Wavelength Dependence of UV Laser Cleaning for Silicon Field Emitter Arrays
- Fabrication of Nano Electron Source Using Beam-Assisted Process
- Mask Pattern Correction by Energy Loss Compensation in Extreme Ultraviolet Lithography
- Analysis of Asymmetry of Printed Image by Off-Axis Incident Light onto Reflective Mask in Extreme Ultraviolet Lithography
- Transport Properties of Pt Nanowires Fabricated by Beam-Induced Deposition
- Influence of Elastic Scattering on the Neutron-Induced Single-Event Upsets in a Static Random Access Memory