Evaluation of the Point Defect Bulk Recombination Rate by Ion Implantation at High Temperatures

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概要

• 論文の詳細を見る
• 1992-02-25

著者

• RYSSEL Heiner

  Fraunhofer Institut fuer Integrierte Schaltungen

• Ryssel Heiner

  Fraunhofer-arbeitsgruppe Fur Integrierte Schaltungen

• Pichler Peter

  Fraunhofer-arbeitsgruppe Fur Integrierte Schaltungen

• SCHORK Rainer

  Fraunhofer-Arbeitsgruppe fur Integrierte Schaltungen

• KLAUSER Thomas

  Fraunhofer-Arbeitsgruppe fur Integrierte Schaltungen

関連論文

• Microprobe Analysis of Pt Films Deposited by Beam Induced Reaction
• Microanalysis of Impurity Contamination in Masklessly Etched Area Using Focused Ion Beam
• Electron-Beam-Induced Deposition of Pt for Field Emitter Arrays
• A Computationally Efficient Method for Three-Dimensional Simulation of Ion Implantation (Special lssue on SISPAD'99)
• Evaluation of the Point Defect Bulk Recombination Rate by Ion Implantation at High Temperatures
• Transmission-Electron-Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition

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