Transmission-Electron-Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition
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概要
- 論文の詳細を見る
Pt pillars with a waist size of 20 nm and a length of 300 nm were fabricated by electron-beam-induced deposition and characterized by transmission electron microscopy before and after annealing or radical oxygen gas exposure. The average grain size of Pt nanocrystals was found to increase from $1.9\pm 0.3$ to $4.3\pm 1.0$ nm after annealing at 450 °C. The Pt nanocrystals seem to coalesce with annealing. This result indicates that the change in the electron transport of Pt nanowires after annealing is due to the physical coalescence and the increase in the grain size of the Pt nanocrystals. The Pt nanocrystals were found to appear at the tip surface owing to the removal of the amorphous carbon matrix by radical oxygen gas exposure.
- 2009-06-25
著者
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RYSSEL Heiner
Fraunhofer Institut fuer Integrierte Schaltungen
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Ichikawa Satoshi
Organization For Promotion Of Research On Nanoscience And Nanotechnology Osaka University
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Takai Mikio
Center for Quantum Science and Technology under Extreme Conditions and Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan
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Wakaya Fujio
Center for Quantum Science and Technology under Extreme Conditions, Osaka University, Toyonaka, Osaka 560-8531, Japan
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Takamoto Kunio
Center for Quantum Science and Technology under Extreme Conditions, Osaka University, Toyonaka, Osaka 560-8531, Japan
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Murakami Katsuhisa
Center for Quantum Science and Technology under Extreme Conditions, Osaka University, Toyonaka, Osaka 560-8531, Japan
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Matsubara Naoki
Center for Quantum Science and Technology under Extreme Conditions, Osaka University, Toyonaka, Osaka 560-8531, Japan
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Kisa Toshiya
Center for Quantum Science and Technology under Extreme Conditions, Osaka University, Toyonaka, Osaka 560-8531, Japan
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Nakayama Takahito
Center for Quantum Science and Technology under Extreme Conditions, Osaka University, Toyonaka, Osaka 560-8531, Japan
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Petersen Silke
Fraunhofer Institute of Integrated Systems and Device Technology, Schottkystrasse 10, 91058 Erlangen, Germany
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Amon Brigitte
Fraunhofer Institute of Integrated Systems and Device Technology, Schottkystrasse 10, 91058 Erlangen, Germany
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Ryssel Heiner
Fraunhofer Institute of Integrated Systems and Device Technology, Schottkystrasse 10, 91058 Erlangen, Germany
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Ichikawa Satoshi
Organization for the Promotion of Research on Nanoscience and Nanotechnology, Osaka University, Toyonaka, Osaka 560-8531, Japan
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