23-P-06 Nano Crystalline and Smooth Surface Epilayer Formations of 3C-SiC at Low Temperatures Using Energetic Ions
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概要
- 論文の詳細を見る
- 日本セラミックス協会の論文
- 2003-09-29
著者
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Horino Y
Advanced Device Development Dept. Renesas Technology Corp.
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MOKUNO Yoshiaki
National Institute of Advanced Industrial Science and Technology
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CHAYAHARA Akiyoshi
National Institute of Advanced Industrial Science and Technology
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TSUBOUCHI Nobuteru
National Institute of Advanced Industrial Science and Technology
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HORINO Yuji
National Institute of Advanced Industrial Science and Technology
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KINOMURA Atsushi
National Institute of Advanced Industrial Science and Technology
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