Microbeam Line of MeV Heavy Ions for Materials Modification and In-Situ Analysis : Beam-Induced Physics and Chemistry

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-01-31

著者

• Satoh Minoru

  Nagaoka University Of Technology

• Horino Y

  Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)

• Satoh M

  Tohoku Univ. Sendai Jpn

• TAKAI Mikio

  Faculty of Engineering Science, and Research Center for Extreme Materials, Osaka University

• CHAYAHARA Akiyoshi

  Government Industrial Research Institute

• KIUCHI Masato

  Government Industrial Research Institute

• HORINO Yuji

  Government Industrial Research Institute

• FUJII Kanenaga

  Government Industrial Research Institute

• SATOH Mamoru

  Government Industrial Research Institute Osaka

• HORINO Yuji

  National Institute of Advanced Industrial Science and Technology

• Horiba Yasutaka

  System Lsi Laboratory Mitsubishi Electric Corporation

• Chayahara Akiyoshi

  Department Of Electrical Engineering Hiroshima University

• Hirano Y

  Advanced Device Development Dept. Renesas Technology Corp.

• Kiuchi M

  National Inst. Advanced Industrial Sci. And Technol. Osaka Jpn

• Horino Yuji

  National Inst. Of Advanced Industrial Sci. And Technol. Kansai Osaka Jpn

• Takai Mikio

  Faculty Of Engineering Science And Research Center For Extreme Materials (rcem) Osaka University

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