High-Sensitivity Channeling Analysis of Lattice Disorder Near Surfaces Using Secondary Electrons Induced by Fast Ions

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-02-15

著者

• Kito Hijiri

  Department Of Physics Aoyama-gakuin University

• Satoh Minoru

  Nagaoka University Of Technology

• YAMAMOTO Yasuhiro

  Department of Chemistry, Faculty of Science, Toho University

• Yokoyama Y

  Inst. For Materials Res. Tohoku Univ.

• Satoh M

  Tohoku Univ. Sendai Jpn

• Inoue T

  Tohoku Univ. Sendai Jpn

• Inoue T

  Advanced Discrete Semiconductor Technology Laboratory Corporated Research And Development Center Tos

• Kudo Hiroshi

  Institute Of Applied Physics University Of Tsukuba

• Inoue Tatsuya

  Materials And Components Research Laboratory Components And Devices Research Center Matsushita Elect

• Inoue Tetsushi

  Research Laboratory Of Resources Utilization Tokyo Institute Of Technology

• Satoh Masaharu

  Department Of Electrical Engineering Faculty Of Engineering Osaka University

• Yoshida Y

  Department Of Energy Engineering And Science Nagoya University

• Yamada Y

  Akita Univ. Akita Jpn

• Inoue Takahito

  Electrotechnical Laboratory

• Satoh M

  Department Of Physics Faculty Of Science Okayama University

• Ipposhi Takashi

  Advanced Device Development Dept. Renesas Technology Corp.

• ISHIHARA Toyoyuki

  Tandem Accelerator Center, University of Tsukuba

• SATOH Masataka

  Research Center of Ion Beam Technology, Hosei University

• INOUE Tomoyasu

  Department of Electronic Engineering, Iwaki Meisei University

• Seki S

  Department Of Industrial Chemistry Graduate School Of Engineering Tokyo Institute Of Polytechnics

• Seki Seiji

  Ulvac Japan Ltd.

• Tanabe A

  Institute Of Applied Physics University Of Tsukuba

• Satoh Masataka

  Research Center Of Ion Beam Technology And College Of Engineering Hosei University

• FUKUSHO Taro

  Institute of Applied Physics, University of Tsukuba

• TANABE Atsushi

  Institute of Applied Physics, University of Tsukuba

• Fukusho Taro

  Institute Of Applied Physics University Of Tsukuba

• Inoue T

  Applied Laser Engineering Research Institute

• Ishihara T

  Hyogo Prefectural Institute Of Industrial Research(hpiir)

• Ishihara T

  Hyogo Prefectural Institute Of Industrial Research

• Kanda H

  Univ. Tsukuba Ibaraki

• Yokoyama Yoshihiko

  Superconductivity Research Laboratory, International Superconductivity Technology Center

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