Synthesis and Surface Acoustic Wave Property of Aluminum Nitride Thin Films Fabricated on Silicon and Diamond Substrates Using the Sputtering Method : Surfaces, Interfaces, and Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-08-15
著者
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Koga Y
National Institute Of Advanced Industrial Science And Technology (aist)
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NAKAMURA Takako
National Institute of Advanced Industrial Science and Technology (AIST)
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KOGA Yoshinori
National Institute of Advanced Industrial Science and Technology (AIST)
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ISHIHARA Masatou
National Institute of Advanced Industrial Science and Technology Research Center for Advanced Carbon
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MANABE Takaaki
National Institute of Advanced Industrial Science and Technology
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KUMAGAI Toshiya
National Institute of Advanced Industrial Science and Technology
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FUJIWARA Syuzo
National Institute of Advanced Industrial Science and Technology
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EBATA Yasuo
Department of SAW Engineering, Toshiba Corporation
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SHIKATA Shin-ichi
Diamond SAW Device Project, Sumitomo Electric Industries Ltd.
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NAKAHATA Hideaki
Diamond SAW Device Project, Sumitomo Electric Industries Ltd.
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HACHIGO Akihiro
Diamond SAW Device Project, Sumitomo Electric Industries Ltd.
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Nakahata H
Sumitomo Electric Ind. Ltd. Hyogo Jpn
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Nakahata Hideaki
Itami Research Laboratories Sumitomo Electric Industries Ltd.
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Ebata Yasuo
Department Of Saw Engineering Toshiba Corporation
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Koga Y
Department Of Physics Kurume University
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Nakamura Takako
Research Center For Advanced Carbon Materials National Institute Of Advanced Industrial Science And
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SHIKATA Shin-ichi
IT Components Division, Sumitomo Electric Industries, Ltd.
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Kumagai Toshiya
National Inst. Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Yoshida Kentaro
Itami Research Laboratories. Sumitomo Electric Industries Ltd.
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Shikata S
It Components Division Sumitomo Electric Industries Ltd.
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Fujiwara Syuzo
National Chemical Laboratory For Industry Tsukuba Research Center
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Hachigo Akihiro
Itami Research Laboratories Sumitomo Electric Industries Ltd.
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Shikata Shin-ichi
Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)
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Ishihara Masatou
Research Center For Advanced Carbon Materials National Institute Of Advanced Industrial Science And
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Nakamura Takako
National Institute Of Advanced Industrial Science And Technology
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Manabe Takaaki
National Institute of Advance Industrial Science and Technology (AIST)
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Koga Yoshinori
National Chemical Laboratory for Industry
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Ishihara Masatou
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8565, Japan
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Kumagai Toshiya
National Chemical Laboratory for Industry
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