Development of Plasma Based Ion Implantation System using an Electron Cyclotron Resonance Plasma Source with a Mirror Field and Synthesis of Carbon Thin Films

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2001-07-15

著者

• Koga Y

  National Institute Of Advanced Industrial Science And Technology (aist)

• Watanabe Toshiya

  Japan Fine Ceramics Center Joint Research Consortium Of Frontier Carbon Technology C-o Research Cent

• Koga Yoshinori

  Research Center For Advanced Carbon Materials Aist

• YAMAMOTO Kazuhiro

  Research Center for Advanced Carbon Materials, AIST

• TANAKA Akihiro

  Research Center for Advanced Carbon Materials, AIST

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• Development of Plasma Based Ion Implantation System using an Electron Cyclotron Resonance Plasma Source with a Mirror Field and Synthesis of Carbon Thin Films

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