Observation of Sputtered Si Surface Irradiated with Metal Cluster Complex Ions
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-06-30
著者
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YAMAMOTO Kazuhiro
Research Center for Advanced Carbon Materials, AIST
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Fujiwara Yukio
Research Institute Of Instrumentation Frontier (riif) National Institute Of Advanced Industrial Scie
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TERANISHI Yoshikazu
Research Institute of Instrumentation Frontier (RIIF), National Institute of Advanced Industrial Sci
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KONDOU Kouji
Research Institute of Instrumentation Frontier (RIIF), National Institute of Advanced Industrial Sci
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NONAKA Hidehiko
Research Institute of Instrumentation Frontier (RIIF), National Institute of Advanced Industrial Sci
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TOMITA Misuhiro
Corporate Research and Development Center, Toshiba Corporation
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FUJIMOTO Toshiyuki
Research Institute of Instrumentation Frontier (RIIF), National Institute of Advanced Industrial Sci
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ICHIMURA Shingo
Research Institute of Instrumentation Frontier (RIIF), National Institute of Advanced Industrial Sci
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Ichimura Shingo
Research Institute Of Instrumentation Frontier (riif) National Institute Of Advanced Industrial Scie
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Nonaka Hidehiko
Research Institute Of Instrumentation Frontier (riif) National Institute Of Advanced Industrial Scie
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Kondou Kouji
Research Institute Of Instrumentation Frontier (riif) National Institute Of Advanced Industrial Scie
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Tomita Mitsuhiro
Corporate Research And Development Center Toshiba Corporation
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Yamamoto Kazuhiro
Research Center For Advanced Carbon Materials Aist
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Yamamoto Kazuhiro
Research Institute Of Instrumentation Frontier (riif) National Institute Of Advanced Industrial Scie
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Tomita Misuhiro
Corporate Research And Development Center Toshiba Corporation
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Teranishi Yoshikazu
Research Institute Of Instrumentation Frontier (riif) National Institute Of Advanced Industrial Scie
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Fujimoto Toshiyuki
Research Institute Of Instrumentation Frontier (riif) National Institute Of Advanced Industrial Scie
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