Beam-induced Nanoscale Ripple Formation on Silicon with the Metal-Cluster-Complex Ion of Ir4(CO)7+

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概要

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• The surface topography of Si(100) bombarded with 2.5–10 keV Ir4(CO)7+ at an incident angle of 45° was investigated by atomic force microscopy. Experimental results showed that self-organized ripple structures with a wavelength below 30 nm were produced at a beam energy of 5 keV. It was found that the wavelength of the ripples increased with decreasing beam energy, which is different from results obtained using conventional ion beams. In addition, surface roughness proved to increase with decreasing beam energy. The phenomena were explained by considering a substantial decrease in sputtering yield and the subsequent compositional change in the target at lower-beam-energy Ir4(CO)7+ bombardment. Furthermore, the surface roughness was also confirmed to increase with increasing oxygen partial pressure.

• Japan Society of Applied Physicsの論文
• 2007-09-25

著者

• Itoh Hiroshi

  National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn

• FUJIWARA Yukio

  National Institute of Advanced Industrial Science and Technology (AIST)

• KONDOU Kouji

  National Institute of Advanced Industrial Science and Technology (AIST)

• NONAKA Hidehiko

  National Institute of Advanced Industrial Science and Technology (AIST)

• FUJIMOTO Toshiyuki

  National Institute of Advanced Industrial Science and Technology (AIST)

• KUROKAWA Akira

  National Institute of Advanced Industrial Science and Technology (AIST)

• Ichimura Shingo

  National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn

• Tomita Mitsuhiro

  Corporate Research And Development Center Toshiba Corporation

• Saito Naoaki

  National Institute Of Advanced Industrial Science And Technology

• Saito Naoaki

  National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan

• Watanabe Kouji

  National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan

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