Reliability of parameters of associated base straight line in step height samples : Uncertainty evaluation in step height measurements using nanometrological AFM
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概要
- 論文の詳細を見る
- 2006-01-01
著者
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OHMI Tadahiro
Tohoku University
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FUJIMOTO Toshiyuki
National Institute of Advanced Industrial Science and Technology (AIST)
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Ohmi Tadahiro
Tohoku Univ. Sendai Jpn
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KUROSAWA Tomizo
National Research Laboratory of Metrology
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KOJIMA Isao
National Institute of Materials and Chemical Research
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Kojima I
National Metrology Institute Of Japan National Institute Of Advanced Industrial Science And Technolo
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Gonda S
The Institute Of Scientific And Industrial Research Osaka University
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Gonda Satoshi
National Metrology Institute Of Japan Aist
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Gonda Satoshi
National Metrology Institute Of Japan National Institute Of Advanced Industrial Science And Technolo
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Azuma Yasushi
National Metrology Institute Of Japan National Institute Of Advanced Industrial Science And Technolo
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TAKAMASU Kiyoshi
The University of Tokyo
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Kurosawa T
National Metrology Institute Of Japan National Institute Of Advanced Industrial Science And Technolo
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MISUMI Ichiko
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technol
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SAKURAI Toshihisa
Tohoku University
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Misumi Ichiko
National Metrology Institute Of Japan National Institute Of Advanced Industrial Science And Technolo
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Kojima Isao
National Chemical Laboratory For Industry
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Fujimoto Toshiyuki
National Metrology Institute Of Japan National Institute Of Advanced Industrial Science And Technolo
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Ohmi Tadahiro
Tohoku Univ.
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Kurosawa Tomizo
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)
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