P-PW-05 Development of the non-resonance type ultra-sonic motor and its application for XY-stage
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概要
- 論文の詳細を見る
12-inch fine ceramic XY-stage driven by a NRUSM (non-resonance type ultrasonic motor), focused for LSI manufacturing devices, has achieved maximum velocity of 140 mm/s over the stroke of 300 mm, with 0.6 nm positioning accuracy. We report the results of the endurance test, 200km continuous driving, which was achieved by reciprocating the stage, under servo control operation.
- 一般社団法人日本機械学会の論文
著者
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Nakada Akira
Kumamoto Univ. Kumamoto Jpn
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KOSAKA Kouji
Tech-concierge Kumamoto Inc.
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OHMI Tadahiro
Tohoku University
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Ohmi Tadahiro
Tohoku Univ. Sendai Jpn
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ENDO Taishi
Graduate School of Science and Technology, Kumamoto University
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EGASHIRA Yoshiya
Kumamoto Technology and Industry Foundation
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NAKADA Akira
Graduate School of Science and Technology, Kumamoto University
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KUBOTA Hiroshi
Graduate School of Science and Technology, Kumamoto University
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KOSAKA Kouji
Kumamoto Technology Inc.
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IWABUCHI Tetsuya
Kumamoto Technology Inc.
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OKUDERA Satoru
Kumamoto Technology Inc.
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NAGAMOTO Keiichi
Graduate School of Science and Technology Kumamoto University
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Takashi Harada
Graduate School of Science and Technology Kumamoto University
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HASHIGUTI Hiroyuki
Graduate School of Science and Technology Kumamoto University
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MORIZONO Yasuhiro
Graduate School of Science and Technology Kumamoto University
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IWABUCHI Tetsuya
UCAR
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Endo Taishi
Kumamoto Univ. Kumamoto Jpn
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Okudera Satoru
Kumamoto Technology Inc.:tokyo Technology Inc.
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Nakada Akira
Graduate School Of Science And Technology Kumamoto University
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Endo Taishi
Graduate School Of Science And Technology Kumamoto University
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Egashira Yoshiya
Kumamoto Technology Inc.:tokyo Technology Inc.:graduate School Of Science And Technology Kumamoto Un
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Ohmi Tadahiro
Tohoku Univ.
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Kubota Hiroshi
Graduate School Of Science And Technology Kumamoto University
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Iwabuchi T
Ucar
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