Wear Reduction Method for Frictionally Fast Feeding Piezoactuator

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概要

• 論文の詳細を見る

• A new wear reduction method, which is based on a static friction without slipping, is developed for a frictionally fast feeding piezoactuator. This method is required for overcoming the problems related to the scattering of particles due to the use of a contact type actuator. Furthermore, wear reduction result in a frictionally driving actuator with a long-term stability for various applications, such as the electron beam inspection in the next-generation semiconductor industry.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-02-15

著者

• KOSAKA Kouji

  Tech-concierge Kumamoto Inc.

• HASHIGUCHI Hiroyuki

  Graduate School of Science and Technology, Kumamoto University

• Nakada Akira

  Graduate School Of Science And Technology Kumamoto University

• Endo Taishi

  Graduate School Of Science And Technology Kumamoto University

• Kubota Hiroshi

  Graduate School Of Science And Technology Kumamoto University

• Furukawa Hiroyuki

  Graduate School Of Science And Technology Kumamoto University

• Ohmi Tadahiro

  New Industry Creation Hatchery Center (niche) Tohoku University

• Iwabuchi Tetsuya

  Tech-concierge Kumamoto Incorporated, 2020-3 Tabaru Mashiki, Kamimashiki-gun, Kumamoto 861-2202, Japan

• Uozumi Kiyohiko

  College of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, Japan

• Baba Tetsuro

  Tech-concierge Kumamoto Incorporated, 2020-3 Tabaru Mashiki, Kamimashiki-gun, Kumamoto 861-2202, Japan

• Egashira Yoshiya

  Zygc K.K., Ueno Sanwa Bldg., 1-14-4 Higashiueno, Taito-ku, Tokyo 110-0015, Japan

• Hashimoto Seiji

  Faculty of Engineering, Gunma University, 1-5-1 Tenjin-cho, Kiryu, Gunma 376-8515, Japan

• Touge Mutsumi

  Graduate School of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan

• Kosaka Kouji

  Tech-concierge Kumamoto Incorporated, 2020-3 Tabaru Mashiki, Kamimashiki-gun, Kumamoto 861-2202, Japan

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