Nondestructive Measurement of Nonlinear Conduction of Nanoscale Materials, Nanoscale SiO2, and K0.3MoO3 by Pulse Photoconductivity Method
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概要
- 論文の詳細を見る
We propose a pulse photoconductivity method (PPCM) for the nondestructive measurement of nanoscale materials with abrupt transitions into higher conduction states from insulated states. The nonlinear conductivity of the highly insulating SiO2 and the charge density wave (CDW) are observed and demonstrated in a short time even for long-time-constant circuits. One can determine the instantaneity of the PPCM in the case of applying an in-line evaluation technique to the LSI industry.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2011-11-25
著者
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Kanayama Toshihiko
National Inst. Of Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Kubota Hiroshi
Graduate School Of Science And Technology Kumamoto University
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Kanayama Toshihiko
National Institute of Advanced Industrial Science and Technology Tsukuba West 7, Tsukuba, Ibaraki 305-8569, Japan
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Kobayashi Kazuhiro
Hanwa Electronic Industry Co., Ltd., Tamana, Kumamoto 861-0913, Japan
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Soh Yuki
Graduate School of Science and Technology, Kumamoto University, Kumamoto 860-8555, Japan
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Nishi Yuya
Graduate School of Science and Technology, Kumamoto University, Kumamoto 860-8555, Japan
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Hirano Toshimasa
Graduate School of Science and Technology, Kumamoto University, Kumamoto 860-8555, Japan
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Yoshino Akira
Hanwa Electronic Industry Co., Ltd., Tamana, Kumamoto 861-0913, Japan
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- Nondestructive Measurement of Nonlinear Conduction of Nanoscale Materials, Nanoscale SiO2, and K0.3MoO3 by Pulse Photoconductivity Method
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