Damage-Free Microwave-Excited Plasma Contact Hole Etching without Carrier Deactivation at the Interface between Silicide and Heavily-Doped Si
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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野平 博司
Musashi Institute Of Technology
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TERAMOTO Akinobu
New Industry Creation Hatchery Center, Tohoku University
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SUGAWA Shigetoshi
Graduate School of Engineering, Tohoku University
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OHMI Tadahiro
New Industry Creation Hatchery Center, Tohoku University
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Sugawa S
Graduate School Of Engineering Tohoku University
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HIGUCHI Masaaki
TOSHIBA CORPORATION
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SUGAWA Sigetoshi
Tohoku University
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HIRAYAMA Masaki
New Industry Creation Hatchery Center, Tohoku University
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Goto Tetsuya
New Industry Creation Hatchery Center Tohoku University
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INOKUCHI Atsutoshi
New Industry Creation Hatchery Center, Tohoku University
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Teramoto Akinobu
New Industry Creation Hatchery Center Tohoku University
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Sugawa Shigetoshi
Graduate School Of Engineering Tohoku University
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Sugawa Shigetoshi
Department Of Electronic Engineering Tohoku University
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Hirayama Masaki
Toshiba Corporation
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Hirayama Masaki
New Industry Creation Hatchery Center Tohoku University
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Inokuchi Atsutoshi
New Industry Creation Hatchery Center Tohoku University
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Terasaki Masato
Tokyo Electron Ltd.
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Nohira Hiroshi
Faculty Of Engineering Musashi Institute Of Technology
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Ohmi Tadahiro
New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University
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ASAHARA Hirokazu
New Industry Creation Hatchery Center, Tohoku University
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TERASAKI Masato
New Industry Creation Hatchery Center, Tohoku University
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NAKAZAWA Hiroshi
New Industry Creation Hatchery Center, Tohoku University
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YAMANAKA Jiro
New Industry Creation Hatchery Center, Tohoku University
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Yamanaka Jiro
New Industry Creation Hatchery Center Tohoku University
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Nakazawa Hiroshi
New Industry Creation Hatchery Center Tohoku University
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Teramoto Akinobu
New Industry Creation Hatchery Center Tohoku Univ.
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Asahara Hirokazu
New Industry Creation Hatchery Center Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center (niche) Tohoku University
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Teramoto Akinobu
New Industry Creation Hatchery Center (NICHe), Tohoku University, Sendai 980-8579, Japan
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