Goto Tetsuya | New Industry Creation Hatchery Center Tohoku University
スポンサーリンク
概要
関連著者
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Goto Tetsuya
New Industry Creation Hatchery Center Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center (niche) Tohoku University
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Teramoto Akinobu
New Industry Creation Hatchery Center (NICHe), Tohoku University, Sendai 980-8579, Japan
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Sugawa Shigetoshi
Graduate School Of Engineering Tohoku University
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OHMI Tadahiro
New Industry Creation Hatchery Center, Tohoku University
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TERAMOTO Akinobu
New Industry Creation Hatchery Center, Tohoku University
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HIRAYAMA Masaki
New Industry Creation Hatchery Center, Tohoku University
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Hirayama Masaki
New Industry Creation Hatchery Center Tohoku University
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SUGAWA Shigetoshi
Graduate School of Engineering, Tohoku University
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Teramoto Akinobu
New Industry Creation Hatchery Center Tohoku Univ.
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Isogai Tatsunori
Graduate School Of Engineering Tohoku University
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Teramoto Akinobu
New Industry Creation Hatchery Center Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University
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YAMAUCHI Hiroshi
New Industry Creation Hatchery Center, Tohoku University
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Tanaka Hiroaki
New Industry Creation Hatchery Center Tohoku University
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Sugawa S
Graduate School Of Engineering Tohoku University
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SUGAWA Shigetoshi
New Industry Creation Hatchery Center, Tohoku University
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HIGUCHI Masaaki
TOSHIBA CORPORATION
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SUGAWA Sigetoshi
Tohoku University
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Hirayama Masaki
Toshiba Corporation
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Inokuchi Atsutoshi
New Industry Creation Hatchery Center Tohoku University
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FUNAIWA Kiyoshi
New Industry Creation Hatchery Center, Tohoku University
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Funaiwa Kiyoshi
New Industry Creation Hatchery Center Tohoku University
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TAKAHASHI Ichirou
New Industry Creation Hatchery Center, Tohoku University
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Shirai Yasuyuki
New Industry Creation Hatchery Center (niche) Tohoku University
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Teramoto Akinobu
University Of Tohoku New Industry Creation Hatchery Center (niche)
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Teramoto A
New Industry Creation Hatchery Center Tohoku University
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Ohmi T
Tohoku Univ. Sendai‐shi Jpn
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ISOGAI Tatsunori
Graduate School of Engineering, Tohoku University
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INOKUCHI Atsutoshi
New Industry Creation Hatchery Center, Tohoku University
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Teramoto Akinobu
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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Sugawa Shigetoshi
Department Of Electronic Engineering Tohoku University
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Moriguchi Makoto
New Industry Creation Hatchery Center Tohoku University
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TERASAKI Masato
Graduate School of Engineering, Tohoku University
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TAKAHASHI Ichirou
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University
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SAKURAI Hiroyuki
Specialty Products Division, UBE INDUSTRIES, LTD.
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SAKURAI Hiroyuki
New Industry Creation Hatchery Center, Tohoku University
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YAMADA Atsuhiko
Graduate School of Engineering, Tohoku University
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Sakurai Hiroyuki
New Industry Creation Hatchery Center Tohoku University
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Tanaka Hiroaki
Graduate School Of Engineering The University Of Tokyo
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Goto Tetsuya
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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野平 博司
Musashi Institute Of Technology
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TANAKA Hiroaki
New Industry Creation Hatchery Center, Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center Tohoku University
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Ohmi T
New Industry Creation Hatchery Center Tohoku University
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SUGAWA Shigetoshi
Management of Science and Technology Department Graduate School of Engineering, Tohoku University
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TANAKA Hiroaki
Graduate School of Engineering, Tohoku University
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Ishii Hidekazu
University Of Tohoku New Industry Creation Hatchery Center (niche)
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ITOH Azumi
New Industry Creation Hatchery Center, Tohoku University
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YASUDA Seiji
New Industry Creation Hatchery Center, Tohoku University
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Sugawa Shigetoshi
Management Of Science & Technology Department School Of Engineering Tohoku University
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Terasaki Masato
Tokyo Electron Ltd.
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Nohira Hiroshi
Faculty Of Engineering Musashi Institute Of Technology
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ASAHARA Hirokazu
New Industry Creation Hatchery Center, Tohoku University
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TERASAKI Masato
New Industry Creation Hatchery Center, Tohoku University
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NAKAZAWA Hiroshi
New Industry Creation Hatchery Center, Tohoku University
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YAMANAKA Jiro
New Industry Creation Hatchery Center, Tohoku University
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Yamauchi Hiroshi
Nanoelectronics Research Institute National Institute Of Advanced Industrial Science And Technology
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KATO Takeyoshi
New Industry Creation Hatchery Center, Tohoku University
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Yamanaka Jiro
New Industry Creation Hatchery Center Tohoku University
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Nakazawa Hiroshi
New Industry Creation Hatchery Center Tohoku University
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Tanahashi Naoki
University Of Tohoku New Industry Creation Hatchery Center (niche)
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YAMADA Atsuhiko
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University
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HIRAI Kentaro
New Industry Creation Hatchery Center, Tohoku University
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URABE Shinichi
New Industry Creation Hatchery Center, Tohoku University
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Hirai Kentaro
New Industry Creation Hatchery Center Tohoku University
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Yamada Atsuhiko
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University
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Kitano M
Shimane Univ. Matsue Jpn
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Kato Takeyoshi
New Industry Creation Hatchery Center Tohoku University
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Kato Takeyoshi
University Of Tohoku New Industry Creation Hatchery Center (niche)
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Urabe Shinichi
New Industry Creation Hatchery Center Tohoku University
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HIDAKA Atsushi
University of Tohoku, Department of Electronic Engineering, Graduate School of Engineering
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YAMASHITA Satoru
University of Tohoku, New Industry Creation Hatchery Center (NICHe)
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KITANO Masafumi
University of Tohoku, New Industry Creation Hatchery Center (NICHe)
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GOTO Tetsuya
University of Tohoku, New Industry Creation Hatchery Center (NICHe)
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TERAMOTO Akinobu
University of Tohoku, New Industry Creation Hatchery Center (NICHe)
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SHIRAI Yasuyuki
University of Tohoku, New Industry Creation Hatchery Center (NICHe)
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OHMI Tadahiro
University of Tohoku, New Industry Creation Hatchery Center (NICHe)
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ISOGAI Tatsunori
New Industry Creation Hatchery Center, Tohoku University
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TSUNODA Tomoya
New Industry Creation Hatchery Center, Tohoku University
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Hidaka Atsushi
University Of Tohoku Department Of Electronic Engineering Graduate School Of Engineering
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Yasuda Seiji
New Industry Creation Hatchery Center Tohoku University
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Takahashi Ichirou
Graduate School Of Engineering Tohoku University
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Shimada Hiroyuki
New Industry Creation Hatchery Center Tohoku University
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Watanuki Kohei
New Industry Creation Hatchery Center Tohoku University
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Itoh Azumi
New Industry Creation Hatchery Center Tohoku University
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Shirai Yasuyuki
New Industry Creation Hatchery Center Tohoku University
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Teramoto Akinobu
Department Of Electronics Tohoku University
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Asahara Hirokazu
New Industry Creation Hatchery Center Tohoku University
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Yamashita Satoru
New Industry Creation Hatchery Center Tohoku University
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Tsunoda Tomoya
New Industry Creation Hatchery Center Tohoku University
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Ohmi Tadahiro
University Of Tohoku New Industry Creation Hatchery Center (niche)
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Shigetoshi Sugawa
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Teramoto Akinobu
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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Teramoto Akinobu
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Teramoto Akinobu
New Industry Creation Hatchery Center, Tohoku University, 10 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Teramoto Akinobu
New Industry Creation Hatchery Center, Tohoku University, Aza-Aoba 6-6-10, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Akinobu Teramoto
New Industry Creation Hatchery Center, Tohoku University, 6-6-10 Aza Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Banba Akinori
New Industry Creation Hatchery Center, Tohoku University, Aza-Aoba 6-6-10, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Suzuki Hirokazu
New Industry Creation Hatchery Center, Tohoku University, Aza-Aoba 6-6-10, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Koike Tadashi
Ube-Nitto Kasei Co., Ltd., 2-1-1 Yabutanishi, Gifu 500-8386, Japan
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Adachi Tatsuhiko
Ube-Nitto Kasei Co., Ltd., 2-1-1 Yabutanishi, Gifu 500-8386, Japan
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Hirayama Masaki
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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Hirayama Masaki
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Hirayama Masaki
New Industry Creation Hatchery Center, Tohoku University, 10 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Ohyama Kenji
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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Terasaki Masato
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Ohmi Tadahiro
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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Tadahiro Ohmi
New Industry Creation Hatchery Center, Tohoku University, 6-6-10 Aza Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Hiroe Akihiko
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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GOTO Tetsuya
New Industry Creation Hatchery Center, Tohoku University
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Takahashi Ichirou
New Industry Creation Hatchery Center, Tohoku University, 10 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Urabe Shinichi
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Watanuki Kohei
New Industry Creation Hatchery Center, Tohoku University, Aza-Aoba 6-6-10, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Shirai Yasuyuki
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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Shirai Yasuyuki
New Industry Creation Hatchery Center, Tohoku University, Aza-Aoba 6-6-10, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Yamada Atsuhiko
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, 05 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Yamada Atsuhiko
Graduate School of Engineering, Tohoku University, 05 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Sugawa Shigetoshi
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Ohmi Tadahiro
New Industry Creation Hatchery Center, Tohoku University, 10 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Seki Nobuaki
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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Hirai Kentaro
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Goto Tetsuya
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Tetsuya Goto
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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Goto Tetsuya
New Industry Creation Hatchery Center, Tohoku University, 10 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Funaiwa Kiyoshi
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Funaiwa Kiyoshi
New Industry Creation Hatchery Center, Tohoku University, 10 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Ohmi Tadahiro
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Hiroaki Tanaka
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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Tanaka Hiroaki
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Tatsunori Isogai
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Isogai Tatsunori
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Sugawa Shigetoshi
Graduate School of Engineering, Tohoku University, Aza-Aoba 6-6-11, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Moriguchi Makoto
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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ITO Takashi
Department of Cardiovascular Surgery, Ishinomaki Red Cross Hospital
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Ito Takashi
Department of Electronics Engineering Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Morishita Sadaharu
EES Technology Department Technology Development Center HQ, Industrial Automation Co., OMRON Corporation, Shinagawa, Tokyo 141-0032, Japan
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Akutsu Isao
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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ITO Takashi
Department of Advanced Materials Chemistry, Graduate School of Engineering, Yokohama National University
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Soeda Kazuki
New Industry Creation Hatchery Center, Tohoku University
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Hiratsuka Ryosuke
New Industry Creation Hatchery Center, Tohoku University
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Matsuo Takatoshi
R&D Center, ZEON Corporation
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Iwaki Masamichi
New Industry Creation Hatchery Center, Tohoku University
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Morishita Sadaharu
Technology Collaboration Center, Research and Development HQ, OMRON Corporation, Kyoto 619-0283, Japan
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Sakurai Hiroyuki
Specialty Products Division, UBE INDUSTRIES, LTD, 1978-10, Kogushi, Ube, Yamaguchi 755-8633, Japan
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Sakurai Hiroyuki
New Industry Creation Hatchery Center, Tohoku University, 10 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
著作論文
- Low Contact Resistance with Low Schottky Barrier for N-type Silicon Using Yttrium Silicide
- Low Dielectric Constant Non-Porous Fluorocarbon Films for Inter-Layer Dielectric
- Damage-Free Microwave-Excited Plasma Contact Hole Etching without Carrier Deactivation at the Interface between Silicide and Heavily-Doped Si
- High-Speed Damage-Free Contact Hole Etching Using Dual Shower Head Microwave-Excited High-Density-Plasma Equipment
- Ferroelectric Sr_2(Ta_, Nb_x)_2O_7 with a Low Dielectric Constant by Plasma Physical Vapor Deposition and Oxygen Radical Treatment
- A New Microwave-Excited Plasma Etching Equipment for Separating Plasma Excited Region from Etching Process Region
- MFIS-structure Memory Device with High Quality Ferroelectric Sr_2(Ta_Nb_x)_2O_7 Formed by Physical Vapor Deposition and Oxygen Radical Treatment by Radical Oxygen Assisted Layer by Layer(ROALL) deposition
- Adsorption Behavior of Various Fluorocarbon Gases on Silicon Wafer Surface
- A Low-Dielectric-Constant Sr_2(Ta_, Nb_x)_2O_7 Thin Film Controlling the Crystal Orientation on an IrO_2 Substrate for One-Transistor-Type Ferroelectric Memory Device
- Study of the Reflectivity of Silver Films Deposited by Radio Frequency and Direct Current Coupled Magnetron Sputtering
- Electrical Properties of Metal-Oxide-Containing SiO2 Films Formed by Organosiloxane Sol–Gel Precursor
- Fast Gas Replacement in Plasma Process Chamber by Improving Gas Flow Pattern
- A New Microwave-Excited Plasma Etching Equipment for Separating Plasma Excited Region from Etching Process Region
- Gas Flow Characteristics in a Plasma Process Chamber and Proposal of New Pulse-Controlled Gas Injection Method Using Interference Matrix Operation for Rapid Stabilization of Gas Pressure
- Deposition of Microcrystalline Si1-xGex by RF Magnetron Sputtering on SiO2 Substrates
- Impact of Tungsten Capping Layer on Yttrium Silicide for Low-Resistance n+-Source/Drain Contacts
- Low Contact Resistivity with Low Silicide/p+-Silicon Schottky Barrier for High-Performance p-Channel Metal–Oxide–Silicon Field Effect Transistors
- Ferroelectric Sr2(Ta1-x, Nbx)2O7 with a Low Dielectric Constant by Plasma Physical Vapor Deposition and Oxygen Radical Treatment
- A Low-Dielectric-Constant Sr2(Ta1-x,Nbx)2O7 Thin Film Controlling the Crystal Orientation on an IrO2 Substrate for One-Transistor-Type Ferroelectric Memory Device
- High-Speed Damage-Free Contact Hole Etching Using Dual Shower Head Microwave-Excited High-Density-Plasma Equipment
- Impact of the Use of Xe on Electrical Properties in Magnetron-Sputtering Deposited Amorphous InGaZnO Thin-Film Transistors
- Formation and Property of Yttrium and Yttrium Silicide Films as Low Schottcky Barrier material for n-Type Silicon
- Adhesion Characteristics of Magnetron-Sputter-Deposited Copper on Smooth Cycloolefin for Realizing Wiring with High-Frequency Signal Propagation