Sugawa Shigetoshi | Management Of Science & Technology Department School Of Engineering Tohoku University
スポンサーリンク
概要
関連著者
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Sugawa Shigetoshi
Management Of Science & Technology Department School Of Engineering Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center (niche) Tohoku University
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Teramoto Akinobu
New Industry Creation Hatchery Center (NICHe), Tohoku University, Sendai 980-8579, Japan
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Hirayama Masaki
New Industry Creation Hatchery Center Tohoku University
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Murakawa Shigemi
Management of Science and Technology, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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HATTORI Takeo
New Industry Creation Hatchery Center, Tohoku University
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WATANABE Kazufumi
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University
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Ishino Hideaki
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University
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Tanaka Koutarou
Management Of Science And Technology Department Graduate School Of Engineering Tohoku University
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Goto Tetsuya
New Industry Creation Hatchery Center Tohoku University
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TAKEUCHI Masashi
Tokyo Electron AT Ltd.
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HONDA Minoru
Tokyo Electron AT Ltd.
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ISHIZUKA Shu-ichi
Tokyo Electron AT Ltd.
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HIROTA Yoshihiro
Tokyo Electron AT Ltd.
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Nakanishi Toshio
Tokyo Electron At Ltd. Hyogo Jpn
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Suwa Tomoyuki
New Industry Creation Hatchery Center Tohoku University
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TAKAHASHI Ichirou
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University
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SAKURAI Hiroyuki
Specialty Products Division, UBE INDUSTRIES, LTD.
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Hirai Kentaro
New Industry Creation Hatchery Center Tohoku University
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Yamada Atsuhiko
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University
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Funaiwa Kiyoshi
New Industry Creation Hatchery Center Tohoku University
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Urabe Shinichi
New Industry Creation Hatchery Center Tohoku University
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Teramoto Akinobu
New Industry Creation Hatchery Center Tohoku Univ.
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Akasaka Yasushi
Tokyo Electron Ltd.
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Tanaka Yoshitsugu
Tokyo Electron Ltd.
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Teramoto Akinobu
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Teramoto Akinobu
New Industry Creation Hatchery Center, Tohoku University, Aza-Aoba 04, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Hirayama Masaki
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Hirayama Masaki
New Industry Creation Hatchery Center, Tohoku University, Aza-Aoba 04, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Hattori Takeo
New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan
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Akasaka Yasushi
Tokyo Electron Ltd., Akasaka Bitz Tower, 3-1 Akasaka 5-chome, Minato-ku, Tokyo 107-8481, Japan
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Hirota Yoshihiro
Tokyo Electron AT Ltd., SPA Development and Engineering, 1-8 Fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Urabe Shinichi
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Sugawara Takuya
Tokyo Electron AT Ltd., Technology Development Center, 650, Hosaka-cho Mitsuzawa, Nirasaki, Yamanashi 407-0192, Japan
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Tanaka Yoshitsugu
Tokyo Electron Ltd., Akasaka Bitz Tower, 3-1 Akasaka 5-chome, Minato-ku, Tokyo 107-8481, Japan
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Yamada Atsuhiko
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, 05 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Hirai Kentaro
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Goto Tetsuya
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Funaiwa Kiyoshi
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Sugawa Shigetoshi
Management of Science and Technology, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Ishino Hideaki
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, Aza-Aoba 05, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Ishizuka Shu-ichi
SPA Development and Engineering, Tokyo Electron AT Ltd, Amagasaki, Hyogo 660-0891, Japan
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Nakanishi Toshio
SPA Development and Engineering, Tokyo Electron AT Ltd, Amagasaki, Hyogo 660-0891, Japan
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Ohmi Tadahiro
New Industry Creation Hatchery Center, Tohoku University, 04 Aza Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan
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Tanaka Koutarou
Management of Science and Technology Department Graduate School of Engineering, Tohoku University, Aza-Aoba 05, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Takeuchi Masashi
Tokyo Electron AT Ltd., SPA Development and Engineering, 1-8 Fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Watanabe Kazufumi
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, Aza-Aoba 05, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Nakanishi Toshio
Tokyo Electron AT Ltd., SPA Development and Engineering, 1-8 fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Sakurai Hiroyuki
Specialty Products Division, UBE INDUSTRIES, LTD, 1978-10, Kogushi, Ube, Yamaguchi 755-8633, Japan
著作論文
- Nitrogen Profile Study for SiON Gate Dielectrics of Advanced Dynamic Random Access Memory
- Depth Profile of Nitrogen Atoms in Silicon Oxynitride Films Formed by Low-Electron-Temperature Microwave Plasma Nitridation
- Ferroelectric Sr2(Ta1-x, Nbx)2O7 with a Low Dielectric Constant by Plasma Physical Vapor Deposition and Oxygen Radical Treatment
- A Technology for Reducing Flicker Noise for ULSI Applications