Sugawara Takuya | Tokyo Electron AT Ltd., Technology Development Center, 650, Hosaka-cho Mitsuzawa, Nirasaki, Yamanashi 407-0192, Japan
スポンサーリンク
概要
- Sugawara Takuyaの詳細を見る
- 同名の論文著者
- Tokyo Electron AT Ltd., Technology Development Center, 650, Hosaka-cho Mitsuzawa, Nirasaki, Yamanashi 407-0192, Japanの論文著者
関連著者
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Sugawara Takuya
Tokyo Electron AT Ltd., Technology Development Center, 650, Hosaka-cho Mitsuzawa, Nirasaki, Yamanashi 407-0192, Japan
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Nakanishi Toshio
Tokyo Electron At Ltd. Hyogo Jpn
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Akasaka Yasushi
Tokyo Electron Ltd.
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MURAKAWA Shigemi
Tokyo Electron Ltd.
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TAKEUCHI Masashi
Tokyo Electron AT Ltd.
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HONDA Minoru
Tokyo Electron AT Ltd.
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ISHIZUKA Shu-ichi
Tokyo Electron AT Ltd.
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HIROTA Yoshihiro
Tokyo Electron AT Ltd.
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SUGAWARA Takuya
Tokyo Electron Ltd.
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Ohmi Tadahiro
New Industry Creation Hatchery Center (niche) Tohoku University
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Tanaka Yoshitsugu
Tokyo Electron Ltd.
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Teramoto Akinobu
New Industry Creation Hatchery Center (NICHe), Tohoku University, Sendai 980-8579, Japan
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TERAMOTO Akinobu
New Industry Creation Hatchery Center, Tohoku University
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OHMI Tadahiro
New Industry Creation Hatchery Center, Tohoku University
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Teramoto A
New Industry Creation Hatchery Center Tohoku University
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Tanaka Yoshitsugu
Tokyo Electron Ltd. Tokyo Jpn
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Sugawa S
Graduate School Of Engineering Tohoku University
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Kang Chang
Sematech
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Jammy Raj
Sematech
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Ohmi T
Tohoku Univ. Sendai‐shi Jpn
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SUGAWA Sigetoshi
Tohoku University
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Akasaka Yasushi
Tokyo Electron Ltd. Tokyo Jpn
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NAKANISHII Toshio
Tokyo Electron AT Ltd.
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SUGAWA Shigetoshi
Tokyo Electron AT Ltd.
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Teramoto Akinobu
New Industry Creation Hatchery Center Tohoku University
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Teramoto Akinobu
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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Sugawa Shigetoshi
Graduate School Of Engineering Tohoku University
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Sugawa Shigetoshi
Management Of Science & Technology Department School Of Engineering Tohoku University
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Sugawa Shigetoshi
Department Of Electronic Engineering Tohoku University
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Yamamoto Nobuhiko
Tokyo Electron At Ltd. Spa Development And Engineering
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Ohmi Tadahiro
New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University
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Majhi Prashant
Sematech
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Ozaki Shigenori
Tokyo Electron At Ltd. Spa Development And Engineering
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Matsuyama Seiji
Tokyo Electron At Ltd. Spa Development And Engineering
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Teramoto Akinobu
New Industry Creation Hatchery Center Tohoku Univ.
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OH Jungwoo
SEMATECH
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Teramoto Akinobu
University Of Tohoku New Industry Creation Hatchery Center (niche)
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Kang Chang
SEMATECH, 2706 Montopolis Drive, Austin, TX 78741, U.S.A.
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Joe Raymond
Tokyo Electron America Inc., 2400 Grove Blvd., Austin, TX 78741, U.S.A.
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Kaitsuka Takanobu
Tokyo Electron Ltd., Akasaka Biz Tower, 3-1 Akasaka 5-chome, Minato-ku, Tokyo 107-6325, Japan
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Arikado Tsunetoshi
Tokyo Electron Ltd., Akasaka Biz Tower, 3-1 Akasaka 5-chome, Minato-ku, Tokyo 107-6325, Japan
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Tomoyasu Masayuki
Tokyo Electron Ltd., Akasaka Biz Tower, 3-1 Akasaka 5-chome, Minato-ku, Tokyo 107-6325, Japan
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Akasaka Yasushi
Tokyo Electron Ltd., Akasaka Biz Tower, 3-1 Akasaka 5-chome, Minato-ku, Tokyo 107-6325, Japan
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Akasaka Yasushi
Tokyo Electron Ltd., Akasaka Bitz Tower, 3-1 Akasaka 5-chome, Minato-ku, Tokyo 107-8481, Japan
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Hirota Yoshihiro
Tokyo Electron AT Ltd., SPA Development and Engineering, 1-8 Fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Yamamoto Nobuhiko
Tokyo Electron AT Ltd., SPA Development and Engineering, 1-8 fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Ohta Tomohiro
Tokyo Electron AT Ltd., Technology Development Center, 650, Hosaka-cho Mitsuzawa, Nirasaki, Yamanashi 407-0192, Japan
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Tanaka Yoshitsugu
Tokyo Electron Ltd., Akasaka Bitz Tower, 3-1 Akasaka 5-chome, Minato-ku, Tokyo 107-8481, Japan
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Murakawa Shigemi
Management of Science and Technology, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Katsuki Jiro
Tokyo Electron AT Ltd., SPA Development and Engineering, 650, Hosaka-cho Mitsuzawa, Nirasaki, Yamanashi 407-0192, Japan
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Sugawa Shigetoshi
Management of Science and Technology, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Sasaki Masaru
Tokyo Electron AT Ltd., SPA Development and Engineering, 1-8 fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Tada Yoshihide
Tokyo Electron AT Ltd., Technology Development Center, 650, Hosaka-cho Mitsuzawa, Nirasaki, Yamanashi 407-0192, Japan
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Ozaki Shigenori
Tokyo Electron AT Ltd., SPA Development and Engineering, 1-8 fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Oh Jungwoo
SEMATECH, 2706 Montopolis Drive, Austin, TX 78741, U.S.A.
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Matsuyama Seiji
Tokyo Electron AT Ltd., SPA Development and Engineering, 1-8 fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Takeuchi Masashi
Tokyo Electron AT Ltd., SPA Development and Engineering, 1-8 Fuso-cho, Amagasaki, Hyogo 660-0891, Japan
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Nakanishi Toshio
Tokyo Electron AT Ltd., SPA Development and Engineering, 1-8 fuso-cho, Amagasaki, Hyogo 660-0891, Japan
著作論文
- Nitrogen Profile Study for SiON Gate Dielectrics of Advanced DRAM
- High Mobility SiGe p-Channel Metal–Oxide–Semiconductor Field-Effect Transistors Epitaxially Grown on Si(100) Substrates with HfSiO2 High-$k$ Dielectric and Metal Gate
- Nitrogen Profile Study for SiON Gate Dielectrics of Advanced Dynamic Random Access Memory
- Characterization of Ultra Thin Oxynitride Formed by Radical Nitridation with Slot Plane Antenna Plasma