Ohmi T | New Industry Creation Hatchery Center Tohoku University
スポンサーリンク
概要
関連著者
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OHMI Tadahiro
New Industry Creation Hatchery Center, Tohoku University
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Sugawa S
Graduate School Of Engineering Tohoku University
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Ohmi T
New Industry Creation Hatchery Center Tohoku University
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HIRAYAMA Masaki
New Industry Creation Hatchery Center, Tohoku University
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TERAMOTO Akinobu
New Industry Creation Hatchery Center, Tohoku University
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SUGAWA Shigetoshi
Graduate School of Engineering, Tohoku University
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Teramoto Akinobu
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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TANAKA Koutarou
Management of Science and Technology Department Graduate School of Engineering, Tohoku University
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WATANABE Kazufumi
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University
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ISHINO Hideaki
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University
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SUGAWA Shigetoshi
Management of Science and Technology Department Graduate School of Engineering, Tohoku University
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TANAKA Hiroaki
Graduate School of Engineering, Tohoku University
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CHUANJIE Zhong
New Industry Creation Hatchery Center, Tohoku University
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HAYAKAWA Yukio
New Industry Creation Hatchery Center, Tohoku University
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Tanaka Koutarou
Management Of Science And Technology Department Graduate School Of Engineering Tohoku University
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Goto Tetsuya
New Industry Creation Hatchery Center Tohoku University
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Moriguchi Makoto
New Industry Creation Hatchery Center Tohoku University
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YAMAUCHI Hiroshi
New Industry Creation Hatchery Center, Tohoku University
著作論文
- A Technology for Reducing Flicker Noise for ULSI Applications
- High-Quality Silicon Oxide Film Formed by Diffusion Region Plasma Enhanced Chemical Vapor Deposition and Oxygen Radical Treatment Using Microwave-Excited High-Density Plasma
- A New Microwave-Excited Plasma Etching Equipment for Separating Plasma Excited Region from Etching Process Region