YAMAUCHI Hiroshi | New Industry Creation Hatchery Center, Tohoku University

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概要

• 同名の論文著者
• New Industry Creation Hatchery Center, Tohoku Universityの論文著者

関連著者

• Goto Tetsuya

  New Industry Creation Hatchery Center Tohoku University

• YAMAUCHI Hiroshi

  New Industry Creation Hatchery Center, Tohoku University

• SUGAWA Shigetoshi

  Graduate School of Engineering, Tohoku University

• OHMI Tadahiro

  New Industry Creation Hatchery Center, Tohoku University

• HIRAYAMA Masaki

  New Industry Creation Hatchery Center, Tohoku University

• Sugawa Shigetoshi

  Graduate School Of Engineering Tohoku University

• Hirayama Masaki

  New Industry Creation Hatchery Center Tohoku University

• Moriguchi Makoto

  New Industry Creation Hatchery Center Tohoku University

• TERASAKI Masato

  Graduate School of Engineering, Tohoku University

• Ohmi Tadahiro

  New Industry Creation Hatchery Center (niche) Tohoku University

• Goto Tetsuya

  New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan

• TERAMOTO Akinobu

  New Industry Creation Hatchery Center, Tohoku University

• Sugawa S

  Graduate School Of Engineering Tohoku University

• Ohmi T

  New Industry Creation Hatchery Center Tohoku University

• Yamauchi Hiroshi

  Nanoelectronics Research Institute National Institute Of Advanced Industrial Science And Technology

• KATO Takeyoshi

  New Industry Creation Hatchery Center, Tohoku University

• Kato Takeyoshi

  New Industry Creation Hatchery Center Tohoku University

• Teramoto Akinobu

  New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan

• Teramoto Akinobu

  New Industry Creation Hatchery Center (NICHe), Tohoku University, Sendai 980-8579, Japan

• Hirayama Masaki

  New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan

• Terasaki Masato

  Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan

• Sugawa Shigetoshi

  Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan

• Moriguchi Makoto

  New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan

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著作論文

• High-Speed Damage-Free Contact Hole Etching Using Dual Shower Head Microwave-Excited High-Density-Plasma Equipment
• A New Microwave-Excited Plasma Etching Equipment for Separating Plasma Excited Region from Etching Process Region
• A New Microwave-Excited Plasma Etching Equipment for Separating Plasma Excited Region from Etching Process Region
• High-Speed Damage-Free Contact Hole Etching Using Dual Shower Head Microwave-Excited High-Density-Plasma Equipment

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