Hirayama Masaki | New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan

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概要

• Hirayama Masakiの詳細を見る
• 同名の論文著者
• New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japanの論文著者

関連著者

• Hirayama Masaki

  New Industry Creation Hatchery Center Tohoku University

• Ohmi Tadahiro

  New Industry Creation Hatchery Center (niche) Tohoku University

• Hirayama Masaki

  New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan

• Goto Tetsuya

  New Industry Creation Hatchery Center Tohoku University

• ISHIKAWA Hiraku

  TOKYO ELECTRON LTD.

• NOZAWA Toshihisa

  TOKYO ELECTRON LTD.

• MATSUOKA Takaaki

  TOKYO ELECTRON LTD.

• ITO Takashi

  Graduate School of Engineering, Tohoku University

• Sugawa Shigetoshi

  Graduate School Of Engineering Tohoku University

• Moriguchi Makoto

  New Industry Creation Hatchery Center Tohoku University

• YAMAUCHI Hiroshi

  New Industry Creation Hatchery Center, Tohoku University

• Teramoto Akinobu

  New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan

• Teramoto Akinobu

  New Industry Creation Hatchery Center (NICHe), Tohoku University, Sendai 980-8579, Japan

• Matsuoka Takaaki

  Tokyo Electron Technology Development Institute, Inc., Sendai 981-3131, Japan

• Nozawa Toshihisa

  Tokyo Electron Technology Development Institute, Inc., Sendai 981-3131, Japan

• Goto Tetsuya

  New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan

• Moriguchi Makoto

  New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan

• Ito Takashi

  Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan

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著作論文

• A New Microwave-Excited Plasma Etching Equipment for Separating Plasma Excited Region from Etching Process Region
• Evaluation of New Amorphous Hydrocarbon Film for Copper Barrier Dielectric Film in Low-$k$ Copper Metallization

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