Low Dielectric Constant Non-Porous Fluorocarbon Films for Inter-Layer Dielectric

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概要

• 論文の詳細を見る
• 2007-09-19

著者

• TERAMOTO Akinobu

  New Industry Creation Hatchery Center, Tohoku University

• OHMI Tadahiro

  New Industry Creation Hatchery Center, Tohoku University

• Teramoto A

  New Industry Creation Hatchery Center Tohoku University

• Ohmi T

  Tohoku Univ. Sendai‐shi Jpn

• HIGUCHI Masaaki

  TOSHIBA CORPORATION

• HIRAYAMA Masaki

  New Industry Creation Hatchery Center, Tohoku University

• Goto Tetsuya

  New Industry Creation Hatchery Center Tohoku University

• ITOH Azumi

  New Industry Creation Hatchery Center, Tohoku University

• INOKUCHI Atsutoshi

  New Industry Creation Hatchery Center, Tohoku University

• YASUDA Seiji

  New Industry Creation Hatchery Center, Tohoku University

• Teramoto Akinobu

  New Industry Creation Hatchery Center Tohoku University

• Teramoto Akinobu

  Department Of Electronic Engineering Faculty Of Engineering Tohoku University

• Hirayama Masaki

  Toshiba Corporation

• Hirayama Masaki

  New Industry Creation Hatchery Center Tohoku University

• Inokuchi Atsutoshi

  New Industry Creation Hatchery Center Tohoku University

• Ohmi Tadahiro

  New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University

• Yasuda Seiji

  New Industry Creation Hatchery Center Tohoku University

• Teramoto Akinobu

  New Industry Creation Hatchery Center Tohoku Univ.

• Itoh Azumi

  New Industry Creation Hatchery Center Tohoku University

• Teramoto Akinobu

  University Of Tohoku New Industry Creation Hatchery Center (niche)

• Ohmi Tadahiro

  New Industry Creation Hatchery Center (niche) Tohoku University

• Teramoto Akinobu

  New Industry Creation Hatchery Center (NICHe), Tohoku University, Sendai 980-8579, Japan

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