Impact of High Performance Accumulation-Mode Fully Depleted SOI MOSFETs (先端デバイスの基礎と応用に関するアジアワークショップ(AWAD2005))
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概要
- 論文の詳細を見る
This paper focuses attention on the improved device characteristics of Fully Depleted silicon on insulator (FD-SOI) MOSFETs on Si(100) surface by using normally-off Accumulation-mode device structure. We demonstrated that the current drivability of Accumulation-mode FD-SOI n-MOSFET on Si(100) is about 1.3 times larger than that of conventional Inversion-mode FD-SOI n-MOSFET and the current drivability of Accumulation-mode FD-SOI p-MOSFET is about 1.4 times larger than that of conventional Inversion-mode FD-SOI p-MOSFET. Furthermore, the influence of the impact ion phenomenon in Accumulation-Mode FD-SOI is slightly comparison with that of Inversion-Mode FD-SOI MOSFETs.
- 社団法人電子情報通信学会の論文
- 2005-06-21
著者
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TERAMOTO Akinobu
New Industry Creation Hatchery Center, Tohoku University
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Cheng Weitao
New Industry Creation Hatchery Center Tohoku University
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HIGUCHI Masaaki
TOSHIBA CORPORATION
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SUGAWA Sigetoshi
Tohoku University
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HIRAYAMA Masaki
New Industry Creation Hatchery Center, Tohoku University
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Teramoto Akinobu
New Industry Creation Hatchery Center Tohoku University
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Sugawa Shigetoshi
Graduate School Of Engineering Tohoku University
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Hirayama Masaki
Toshiba Corporation
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Hirayama Masaki
New Industry Creation Hatchery Center Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University
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Teramoto Akinobu
New Industry Creation Hatchery Center Tohoku Univ.
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WEITAO Cheng
Graduate School of Engineering, Tohoku University
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Cheng Weitao
Graduate School of Engineering, Tohoku University
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Ohmi Tadahiro
New Industry Creation Hatchery Center (niche) Tohoku University
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Teramoto Akinobu
New Industry Creation Hatchery Center (NICHe), Tohoku University, Sendai 980-8579, Japan
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