A Comparative Examination of Polyoxide Films Performance Grown by Conventional Dry Thermal (900℃) or Plasma Assisted (400℃) Oxidation Techniques

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概要

• 論文の詳細を見る
• 2001-09-25

著者

• HAMADA Tatsufumi

  Department of Electronic Engineering, Graduate school of Engineering, Tohoku University

• SUGAWA Sigetoshi

  Tohoku University

• Sugawa Shigetoshi

  Graduate School Of Engineering Tohoku University

• Sugawa Shigetoshi

  Department Of Electronic Engineering Tohoku University

• Ohmi Tadahiro

  New Industry Creation Hatchery Center Future Information Industry Creation Center Tohoku University

• Aharoni Herzl

  New Industry Creation Hatchery Center Tohoku University

• IMAIZUMI Fuminobu

  Department of Electronic Engineering, Graduate school of Engineering, Tohoku University

• Imaizumi Fuminobu

  Department Of Electronic Engineering Graduate School Of Engineering Tohoku University

• Hamada Tatsufumi

  Graduate School Of Engineering Tohoku University

• Ohmi Tadahiro

  New Industry Creation Hatchery Center (niche) Tohoku University

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